11/9/2012	11:04:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	11:04:58 AM	Recipe started at 11:04 AM
11/9/2012	11:04:58 AM	Helium valve closed
11/9/2012	11:04:59 AM	H2 valve closed
11/9/2012	11:04:59 AM	BCl3 valve closed
11/9/2012	11:04:59 AM	PH3 valve closed
11/9/2012	11:04:59 AM	SiCl4 pre valve closed
11/9/2012	11:04:59 AM	SiCl4 post valve closed
11/9/2012	11:04:59 AM	Main Vac valve closed
11/9/2012	11:04:59 AM	Bypass valve closed
11/9/2012	11:04:59 AM	Bubbler valve closed
11/9/2012	11:04:59 AM	Helium MFC set to  0.000000
11/9/2012	11:04:59 AM	H2 MFC set to  0.000000
11/9/2012	11:04:59 AM	BCl3 MFC set to  0.000000
11/9/2012	11:04:59 AM	PH3 MFC set to  0.000000
11/9/2012	11:04:59 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:04:59 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:04:59 AM	Tube furnace set to 0
11/9/2012	11:05:02 AM	H2 valve closed
11/9/2012	11:05:02 AM	BCl3 valve closed
11/9/2012	11:05:02 AM	PH3 valve closed
11/9/2012	11:05:02 AM	SiCl4 pre valve closed
11/9/2012	11:05:02 AM	SiCl4 post valve closed
11/9/2012	11:05:02 AM	Main Vac valve closed
11/9/2012	11:05:02 AM	Bypass valve closed
11/9/2012	11:05:02 AM	Bubbler valve closed
11/9/2012	11:05:02 AM	Helium valve opened
11/9/2012	11:05:02 AM	Helium MFC set to  500.000000
11/9/2012	11:05:02 AM	H2 MFC set to  0.000000
11/9/2012	11:05:02 AM	BCl3 MFC set to  0.000000
11/9/2012	11:05:02 AM	PH3 MFC set to  0.000000
11/9/2012	11:05:02 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:05:02 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:05:02 AM	Tube furnace set to 0
11/9/2012	11:06:15 AM	Helium valve closed
11/9/2012	11:06:15 AM	H2 valve closed
11/9/2012	11:06:15 AM	BCl3 valve closed
11/9/2012	11:06:15 AM	PH3 valve closed
11/9/2012	11:06:15 AM	SiCl4 pre valve closed
11/9/2012	11:06:15 AM	SiCl4 post valve closed
11/9/2012	11:06:15 AM	Main Vac valve closed
11/9/2012	11:06:15 AM	Bypass valve closed
11/9/2012	11:06:15 AM	Bubbler valve closed
11/9/2012	11:06:15 AM	Helium MFC set to  0.000000
11/9/2012	11:06:15 AM	H2 MFC set to  0.000000
11/9/2012	11:06:15 AM	BCl3 MFC set to  0.000000
11/9/2012	11:06:15 AM	PH3 MFC set to  0.000000
11/9/2012	11:06:15 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:06:15 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:06:15 AM	Tube furnace set to 0
11/9/2012	11:06:16 AM	Run finished at 11:06 AM
11/9/2012	11:06:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	11:22:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	11:22:55 AM	Recipe started at 11:22 AM
11/9/2012	11:22:55 AM	Helium valve closed
11/9/2012	11:22:55 AM	H2 valve closed
11/9/2012	11:22:55 AM	BCl3 valve closed
11/9/2012	11:22:55 AM	PH3 valve closed
11/9/2012	11:22:55 AM	SiCl4 pre valve closed
11/9/2012	11:22:55 AM	SiCl4 post valve closed
11/9/2012	11:22:55 AM	Main Vac valve closed
11/9/2012	11:22:55 AM	Bubbler valve closed
11/9/2012	11:22:55 AM	Bypass valve opened
11/9/2012	11:22:55 AM	Helium MFC set to  0.000000
11/9/2012	11:22:55 AM	H2 MFC set to  0.000000
11/9/2012	11:22:55 AM	BCl3 MFC set to  0.000000
11/9/2012	11:22:55 AM	PH3 MFC set to  0.000000
11/9/2012	11:22:55 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:22:55 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:22:55 AM	Tube furnace set to 0
11/9/2012	11:24:09 AM	Helium valve closed
11/9/2012	11:24:09 AM	H2 valve closed
11/9/2012	11:24:09 AM	BCl3 valve closed
11/9/2012	11:24:09 AM	PH3 valve closed
11/9/2012	11:24:09 AM	SiCl4 pre valve closed
11/9/2012	11:24:09 AM	SiCl4 post valve closed
11/9/2012	11:24:09 AM	Main Vac valve closed
11/9/2012	11:24:09 AM	Bubbler valve closed
11/9/2012	11:24:09 AM	Bypass valve opened
11/9/2012	11:24:09 AM	Helium MFC set to  0.000000
11/9/2012	11:24:09 AM	H2 MFC set to  0.000000
11/9/2012	11:24:09 AM	BCl3 MFC set to  0.000000
11/9/2012	11:24:09 AM	PH3 MFC set to  0.000000
11/9/2012	11:24:09 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:24:09 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:24:09 AM	Tube furnace set to 0
11/9/2012	11:24:24 AM	Helium valve closed
11/9/2012	11:24:24 AM	H2 valve closed
11/9/2012	11:24:24 AM	BCl3 valve closed
11/9/2012	11:24:24 AM	PH3 valve closed
11/9/2012	11:24:24 AM	SiCl4 pre valve closed
11/9/2012	11:24:24 AM	SiCl4 post valve closed
11/9/2012	11:24:24 AM	Bypass valve closed
11/9/2012	11:24:24 AM	Bubbler valve closed
11/9/2012	11:24:24 AM	Main Vac valve opened
11/9/2012	11:24:24 AM	Helium MFC set to  0.000000
11/9/2012	11:24:24 AM	H2 MFC set to  0.000000
11/9/2012	11:24:24 AM	BCl3 MFC set to  0.000000
11/9/2012	11:24:24 AM	PH3 MFC set to  0.000000
11/9/2012	11:24:24 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:24:24 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:24:24 AM	Tube furnace set to 0
11/9/2012	11:24:25 AM	Run finished at 11:24 AM
11/9/2012	11:24:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	11:30:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/9/2012	11:31:12 AM	Recipe started at 11:31 AM
11/9/2012	11:31:12 AM	Helium valve closed
11/9/2012	11:31:12 AM	H2 valve closed
11/9/2012	11:31:12 AM	BCl3 valve closed
11/9/2012	11:31:12 AM	PH3 valve closed
11/9/2012	11:31:12 AM	SiCl4 pre valve closed
11/9/2012	11:31:12 AM	SiCl4 post valve closed
11/9/2012	11:31:12 AM	Main Vac valve closed
11/9/2012	11:31:12 AM	Bubbler valve closed
11/9/2012	11:31:12 AM	Bypass valve opened
11/9/2012	11:31:12 AM	Helium MFC set to  0.000000
11/9/2012	11:31:12 AM	H2 MFC set to  0.000000
11/9/2012	11:31:12 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:12 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:12 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:12 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:31:12 AM	Tube furnace set to 0
11/9/2012	11:31:12 AM	Helium valve closed
11/9/2012	11:31:12 AM	H2 valve closed
11/9/2012	11:31:12 AM	BCl3 valve closed
11/9/2012	11:31:12 AM	PH3 valve closed
11/9/2012	11:31:12 AM	SiCl4 pre valve closed
11/9/2012	11:31:12 AM	SiCl4 post valve closed
11/9/2012	11:31:12 AM	Main Vac valve closed
11/9/2012	11:31:12 AM	Bubbler valve closed
11/9/2012	11:31:12 AM	Bypass valve opened
11/9/2012	11:31:12 AM	Helium MFC set to  0.000000
11/9/2012	11:31:12 AM	H2 MFC set to  0.000000
11/9/2012	11:31:12 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:12 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:12 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:12 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:31:13 AM	Tube furnace set to 0
11/9/2012	11:31:16 AM	Helium valve closed
11/9/2012	11:31:16 AM	H2 valve closed
11/9/2012	11:31:16 AM	BCl3 valve closed
11/9/2012	11:31:16 AM	PH3 valve closed
11/9/2012	11:31:16 AM	SiCl4 pre valve closed
11/9/2012	11:31:16 AM	SiCl4 post valve closed
11/9/2012	11:31:16 AM	Bypass valve closed
11/9/2012	11:31:16 AM	Bubbler valve closed
11/9/2012	11:31:16 AM	Main Vac valve opened
11/9/2012	11:31:16 AM	Helium MFC set to  0.000000
11/9/2012	11:31:16 AM	H2 MFC set to  0.000000
11/9/2012	11:31:16 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:16 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:16 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:16 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:31:16 AM	Tube furnace set to 0
11/9/2012	11:31:19 AM	Run aborted at 11:31 AM
11/9/2012	11:31:19 AM	Helium valve closed
11/9/2012	11:31:19 AM	H2 valve closed
11/9/2012	11:31:19 AM	BCl3 valve closed
11/9/2012	11:31:19 AM	PH3 valve closed
11/9/2012	11:31:19 AM	SiCl4 pre valve closed
11/9/2012	11:31:19 AM	SiCl4 post valve closed
11/9/2012	11:31:19 AM	Bypass valve closed
11/9/2012	11:31:19 AM	Main Vac valve closed
11/9/2012	11:31:19 AM	Bubbler valve closed
11/9/2012	11:31:19 AM	Helium MFC set to  0.000000
11/9/2012	11:31:19 AM	H2 MFC set to  0.000000
11/9/2012	11:31:19 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:19 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:19 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:19 AM	Tube furnace set to 0
11/9/2012	11:31:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/9/2012	11:31:20 AM	Main Vac valve opened
11/9/2012	11:31:52 AM	Recipe started at 11:31 AM
11/9/2012	11:31:52 AM	Helium valve closed
11/9/2012	11:31:52 AM	H2 valve closed
11/9/2012	11:31:52 AM	BCl3 valve closed
11/9/2012	11:31:52 AM	PH3 valve closed
11/9/2012	11:31:52 AM	SiCl4 pre valve closed
11/9/2012	11:31:52 AM	SiCl4 post valve closed
11/9/2012	11:31:52 AM	Bypass valve closed
11/9/2012	11:31:52 AM	Bubbler valve closed
11/9/2012	11:31:52 AM	Main Vac valve opened
11/9/2012	11:31:52 AM	Helium MFC set to  0.000000
11/9/2012	11:31:52 AM	H2 MFC set to  0.000000
11/9/2012	11:31:52 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:52 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:52 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:52 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:31:52 AM	Tube furnace set to 150
11/9/2012	11:31:58 AM	H2 valve closed
11/9/2012	11:31:58 AM	BCl3 valve closed
11/9/2012	11:31:58 AM	PH3 valve closed
11/9/2012	11:31:58 AM	SiCl4 pre valve closed
11/9/2012	11:31:58 AM	SiCl4 post valve closed
11/9/2012	11:31:58 AM	Bypass valve closed
11/9/2012	11:31:58 AM	Bubbler valve closed
11/9/2012	11:31:58 AM	Helium valve opened
11/9/2012	11:31:58 AM	Main Vac valve opened
11/9/2012	11:31:58 AM	Helium MFC set to  20.000000
11/9/2012	11:31:58 AM	H2 MFC set to  0.000000
11/9/2012	11:31:58 AM	BCl3 MFC set to  0.000000
11/9/2012	11:31:58 AM	PH3 MFC set to  0.000000
11/9/2012	11:31:58 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:31:58 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:31:58 AM	Tube furnace set to 150
11/9/2012	11:32:28 AM	Helium valve closed
11/9/2012	11:32:28 AM	H2 valve closed
11/9/2012	11:32:28 AM	BCl3 valve closed
11/9/2012	11:32:28 AM	PH3 valve closed
11/9/2012	11:32:28 AM	SiCl4 pre valve closed
11/9/2012	11:32:28 AM	SiCl4 post valve closed
11/9/2012	11:32:28 AM	Bypass valve closed
11/9/2012	11:32:28 AM	Bubbler valve closed
11/9/2012	11:32:28 AM	Main Vac valve opened
11/9/2012	11:32:28 AM	Helium MFC set to  0.000000
11/9/2012	11:32:28 AM	H2 MFC set to  0.000000
11/9/2012	11:32:28 AM	BCl3 MFC set to  0.000000
11/9/2012	11:32:28 AM	PH3 MFC set to  0.000000
11/9/2012	11:32:28 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:32:28 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:32:28 AM	Tube furnace set to 150
11/9/2012	11:32:58 AM	H2 valve closed
11/9/2012	11:32:58 AM	BCl3 valve closed
11/9/2012	11:32:58 AM	PH3 valve closed
11/9/2012	11:32:58 AM	SiCl4 pre valve closed
11/9/2012	11:32:58 AM	SiCl4 post valve closed
11/9/2012	11:32:58 AM	Bypass valve closed
11/9/2012	11:32:58 AM	Bubbler valve closed
11/9/2012	11:32:58 AM	Helium valve opened
11/9/2012	11:32:58 AM	Main Vac valve opened
11/9/2012	11:32:58 AM	Helium MFC set to  20.000000
11/9/2012	11:32:58 AM	H2 MFC set to  0.000000
11/9/2012	11:32:58 AM	BCl3 MFC set to  0.000000
11/9/2012	11:32:58 AM	PH3 MFC set to  0.000000
11/9/2012	11:32:58 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:32:58 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:32:58 AM	Tube furnace set to 150
11/9/2012	11:33:28 AM	Helium valve closed
11/9/2012	11:33:28 AM	H2 valve closed
11/9/2012	11:33:28 AM	BCl3 valve closed
11/9/2012	11:33:28 AM	PH3 valve closed
11/9/2012	11:33:28 AM	SiCl4 pre valve closed
11/9/2012	11:33:28 AM	SiCl4 post valve closed
11/9/2012	11:33:28 AM	Bypass valve closed
11/9/2012	11:33:28 AM	Bubbler valve closed
11/9/2012	11:33:28 AM	Main Vac valve opened
11/9/2012	11:33:28 AM	Helium MFC set to  0.000000
11/9/2012	11:33:28 AM	H2 MFC set to  0.000000
11/9/2012	11:33:28 AM	BCl3 MFC set to  0.000000
11/9/2012	11:33:29 AM	PH3 MFC set to  0.000000
11/9/2012	11:33:29 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:33:29 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:33:29 AM	Tube furnace set to 150
11/9/2012	11:33:59 AM	H2 valve closed
11/9/2012	11:33:59 AM	BCl3 valve closed
11/9/2012	11:33:59 AM	PH3 valve closed
11/9/2012	11:33:59 AM	SiCl4 pre valve closed
11/9/2012	11:33:59 AM	SiCl4 post valve closed
11/9/2012	11:33:59 AM	Bypass valve closed
11/9/2012	11:33:59 AM	Bubbler valve closed
11/9/2012	11:33:59 AM	Helium valve opened
11/9/2012	11:33:59 AM	Main Vac valve opened
11/9/2012	11:33:59 AM	Helium MFC set to  20.000000
11/9/2012	11:33:59 AM	H2 MFC set to  0.000000
11/9/2012	11:33:59 AM	BCl3 MFC set to  0.000000
11/9/2012	11:33:59 AM	PH3 MFC set to  0.000000
11/9/2012	11:33:59 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:33:59 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:33:59 AM	Tube furnace set to 150
11/9/2012	11:34:29 AM	Helium valve closed
11/9/2012	11:34:29 AM	H2 valve closed
11/9/2012	11:34:29 AM	BCl3 valve closed
11/9/2012	11:34:29 AM	PH3 valve closed
11/9/2012	11:34:29 AM	SiCl4 pre valve closed
11/9/2012	11:34:29 AM	SiCl4 post valve closed
11/9/2012	11:34:29 AM	Bypass valve closed
11/9/2012	11:34:29 AM	Bubbler valve closed
11/9/2012	11:34:29 AM	Main Vac valve opened
11/9/2012	11:34:29 AM	Helium MFC set to  0.000000
11/9/2012	11:34:29 AM	H2 MFC set to  0.000000
11/9/2012	11:34:29 AM	BCl3 MFC set to  0.000000
11/9/2012	11:34:29 AM	PH3 MFC set to  0.000000
11/9/2012	11:34:29 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:34:29 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:34:29 AM	Tube furnace set to 150
11/9/2012	11:34:59 AM	H2 valve closed
11/9/2012	11:34:59 AM	BCl3 valve closed
11/9/2012	11:34:59 AM	PH3 valve closed
11/9/2012	11:34:59 AM	SiCl4 pre valve closed
11/9/2012	11:34:59 AM	SiCl4 post valve closed
11/9/2012	11:34:59 AM	Bypass valve closed
11/9/2012	11:34:59 AM	Bubbler valve closed
11/9/2012	11:34:59 AM	Helium valve opened
11/9/2012	11:34:59 AM	Main Vac valve opened
11/9/2012	11:34:59 AM	Helium MFC set to  20.000000
11/9/2012	11:34:59 AM	H2 MFC set to  0.000000
11/9/2012	11:34:59 AM	BCl3 MFC set to  0.000000
11/9/2012	11:34:59 AM	PH3 MFC set to  0.000000
11/9/2012	11:34:59 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:34:59 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:34:59 AM	Tube furnace set to 150
11/9/2012	11:35:29 AM	Helium valve closed
11/9/2012	11:35:29 AM	H2 valve closed
11/9/2012	11:35:29 AM	BCl3 valve closed
11/9/2012	11:35:29 AM	PH3 valve closed
11/9/2012	11:35:29 AM	SiCl4 pre valve closed
11/9/2012	11:35:29 AM	SiCl4 post valve closed
11/9/2012	11:35:29 AM	Bypass valve closed
11/9/2012	11:35:29 AM	Bubbler valve closed
11/9/2012	11:35:29 AM	Main Vac valve opened
11/9/2012	11:35:29 AM	Helium MFC set to  0.000000
11/9/2012	11:35:29 AM	H2 MFC set to  0.000000
11/9/2012	11:35:29 AM	BCl3 MFC set to  0.000000
11/9/2012	11:35:29 AM	PH3 MFC set to  0.000000
11/9/2012	11:35:29 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:35:29 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:35:30 AM	Tube furnace set to 150
11/9/2012	11:36:00 AM	H2 valve closed
11/9/2012	11:36:00 AM	BCl3 valve closed
11/9/2012	11:36:00 AM	PH3 valve closed
11/9/2012	11:36:00 AM	SiCl4 pre valve closed
11/9/2012	11:36:00 AM	SiCl4 post valve closed
11/9/2012	11:36:00 AM	Bypass valve closed
11/9/2012	11:36:00 AM	Bubbler valve closed
11/9/2012	11:36:00 AM	Helium valve opened
11/9/2012	11:36:00 AM	Main Vac valve opened
11/9/2012	11:36:00 AM	Helium MFC set to  20.000000
11/9/2012	11:36:00 AM	H2 MFC set to  0.000000
11/9/2012	11:36:00 AM	BCl3 MFC set to  0.000000
11/9/2012	11:36:00 AM	PH3 MFC set to  0.000000
11/9/2012	11:36:00 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:36:00 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:36:00 AM	Tube furnace set to 150
11/9/2012	11:36:30 AM	Helium valve closed
11/9/2012	11:36:30 AM	H2 valve closed
11/9/2012	11:36:30 AM	BCl3 valve closed
11/9/2012	11:36:30 AM	PH3 valve closed
11/9/2012	11:36:30 AM	SiCl4 pre valve closed
11/9/2012	11:36:30 AM	SiCl4 post valve closed
11/9/2012	11:36:30 AM	Bypass valve closed
11/9/2012	11:36:30 AM	Bubbler valve closed
11/9/2012	11:36:30 AM	Main Vac valve opened
11/9/2012	11:36:30 AM	Helium MFC set to  0.000000
11/9/2012	11:36:30 AM	H2 MFC set to  0.000000
11/9/2012	11:36:30 AM	BCl3 MFC set to  0.000000
11/9/2012	11:36:30 AM	PH3 MFC set to  0.000000
11/9/2012	11:36:30 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:36:30 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:36:30 AM	Tube furnace set to 150
11/9/2012	11:37:00 AM	H2 valve closed
11/9/2012	11:37:00 AM	BCl3 valve closed
11/9/2012	11:37:00 AM	PH3 valve closed
11/9/2012	11:37:00 AM	SiCl4 pre valve closed
11/9/2012	11:37:00 AM	SiCl4 post valve closed
11/9/2012	11:37:00 AM	Bypass valve closed
11/9/2012	11:37:00 AM	Bubbler valve closed
11/9/2012	11:37:00 AM	Helium valve opened
11/9/2012	11:37:00 AM	Main Vac valve opened
11/9/2012	11:37:00 AM	Helium MFC set to  20.000000
11/9/2012	11:37:00 AM	H2 MFC set to  0.000000
11/9/2012	11:37:00 AM	BCl3 MFC set to  0.000000
11/9/2012	11:37:00 AM	PH3 MFC set to  0.000000
11/9/2012	11:37:00 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:37:00 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:37:00 AM	Tube furnace set to 150
11/9/2012	11:37:30 AM	Helium valve closed
11/9/2012	11:37:30 AM	H2 valve closed
11/9/2012	11:37:30 AM	BCl3 valve closed
11/9/2012	11:37:30 AM	PH3 valve closed
11/9/2012	11:37:30 AM	SiCl4 pre valve closed
11/9/2012	11:37:30 AM	SiCl4 post valve closed
11/9/2012	11:37:30 AM	Bypass valve closed
11/9/2012	11:37:30 AM	Bubbler valve closed
11/9/2012	11:37:30 AM	Main Vac valve opened
11/9/2012	11:37:30 AM	Helium MFC set to  0.000000
11/9/2012	11:37:30 AM	H2 MFC set to  0.000000
11/9/2012	11:37:30 AM	BCl3 MFC set to  0.000000
11/9/2012	11:37:30 AM	PH3 MFC set to  0.000000
11/9/2012	11:37:30 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:37:30 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:37:31 AM	Tube furnace set to 150
11/9/2012	11:38:01 AM	H2 valve closed
11/9/2012	11:38:01 AM	BCl3 valve closed
11/9/2012	11:38:01 AM	PH3 valve closed
11/9/2012	11:38:01 AM	SiCl4 pre valve closed
11/9/2012	11:38:01 AM	SiCl4 post valve closed
11/9/2012	11:38:01 AM	Bypass valve closed
11/9/2012	11:38:01 AM	Bubbler valve closed
11/9/2012	11:38:01 AM	Helium valve opened
11/9/2012	11:38:01 AM	Main Vac valve opened
11/9/2012	11:38:01 AM	Helium MFC set to  20.000000
11/9/2012	11:38:01 AM	H2 MFC set to  0.000000
11/9/2012	11:38:01 AM	BCl3 MFC set to  0.000000
11/9/2012	11:38:01 AM	PH3 MFC set to  0.000000
11/9/2012	11:38:01 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:38:01 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:38:01 AM	Tube furnace set to 150
11/9/2012	11:38:31 AM	Helium valve closed
11/9/2012	11:38:31 AM	H2 valve closed
11/9/2012	11:38:31 AM	BCl3 valve closed
11/9/2012	11:38:31 AM	PH3 valve closed
11/9/2012	11:38:31 AM	SiCl4 pre valve closed
11/9/2012	11:38:31 AM	SiCl4 post valve closed
11/9/2012	11:38:31 AM	Bypass valve closed
11/9/2012	11:38:31 AM	Bubbler valve closed
11/9/2012	11:38:31 AM	Main Vac valve opened
11/9/2012	11:38:31 AM	Helium MFC set to  0.000000
11/9/2012	11:38:31 AM	H2 MFC set to  0.000000
11/9/2012	11:38:31 AM	BCl3 MFC set to  0.000000
11/9/2012	11:38:31 AM	PH3 MFC set to  0.000000
11/9/2012	11:38:31 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:38:31 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:38:31 AM	Tube furnace set to 150
11/9/2012	11:39:01 AM	H2 valve closed
11/9/2012	11:39:01 AM	BCl3 valve closed
11/9/2012	11:39:01 AM	PH3 valve closed
11/9/2012	11:39:01 AM	SiCl4 pre valve closed
11/9/2012	11:39:01 AM	SiCl4 post valve closed
11/9/2012	11:39:01 AM	Bypass valve closed
11/9/2012	11:39:01 AM	Bubbler valve closed
11/9/2012	11:39:01 AM	Helium valve opened
11/9/2012	11:39:01 AM	Main Vac valve opened
11/9/2012	11:39:01 AM	Helium MFC set to  20.000000
11/9/2012	11:39:01 AM	H2 MFC set to  0.000000
11/9/2012	11:39:01 AM	BCl3 MFC set to  0.000000
11/9/2012	11:39:01 AM	PH3 MFC set to  0.000000
11/9/2012	11:39:01 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:39:01 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:39:01 AM	Tube furnace set to 150
11/9/2012	11:39:31 AM	Helium valve closed
11/9/2012	11:39:31 AM	H2 valve closed
11/9/2012	11:39:31 AM	BCl3 valve closed
11/9/2012	11:39:31 AM	PH3 valve closed
11/9/2012	11:39:31 AM	SiCl4 pre valve closed
11/9/2012	11:39:31 AM	SiCl4 post valve closed
11/9/2012	11:39:31 AM	Bypass valve closed
11/9/2012	11:39:31 AM	Bubbler valve closed
11/9/2012	11:39:31 AM	Main Vac valve opened
11/9/2012	11:39:31 AM	Helium MFC set to  0.000000
11/9/2012	11:39:31 AM	H2 MFC set to  0.000000
11/9/2012	11:39:31 AM	BCl3 MFC set to  0.000000
11/9/2012	11:39:31 AM	PH3 MFC set to  0.000000
11/9/2012	11:39:31 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:39:31 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:39:32 AM	Tube furnace set to 150
11/9/2012	11:40:02 AM	H2 valve closed
11/9/2012	11:40:02 AM	BCl3 valve closed
11/9/2012	11:40:02 AM	PH3 valve closed
11/9/2012	11:40:02 AM	SiCl4 pre valve closed
11/9/2012	11:40:02 AM	SiCl4 post valve closed
11/9/2012	11:40:02 AM	Bypass valve closed
11/9/2012	11:40:02 AM	Bubbler valve closed
11/9/2012	11:40:02 AM	Helium valve opened
11/9/2012	11:40:02 AM	Main Vac valve opened
11/9/2012	11:40:02 AM	Helium MFC set to  20.000000
11/9/2012	11:40:02 AM	H2 MFC set to  0.000000
11/9/2012	11:40:02 AM	BCl3 MFC set to  0.000000
11/9/2012	11:40:02 AM	PH3 MFC set to  0.000000
11/9/2012	11:40:02 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:40:02 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:40:02 AM	Tube furnace set to 150
11/9/2012	11:40:32 AM	Helium valve closed
11/9/2012	11:40:32 AM	H2 valve closed
11/9/2012	11:40:32 AM	BCl3 valve closed
11/9/2012	11:40:32 AM	PH3 valve closed
11/9/2012	11:40:32 AM	SiCl4 pre valve closed
11/9/2012	11:40:32 AM	SiCl4 post valve closed
11/9/2012	11:40:32 AM	Bypass valve closed
11/9/2012	11:40:32 AM	Bubbler valve closed
11/9/2012	11:40:32 AM	Main Vac valve opened
11/9/2012	11:40:32 AM	Helium MFC set to  0.000000
11/9/2012	11:40:32 AM	H2 MFC set to  0.000000
11/9/2012	11:40:32 AM	BCl3 MFC set to  0.000000
11/9/2012	11:40:32 AM	PH3 MFC set to  0.000000
11/9/2012	11:40:32 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:40:32 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:40:32 AM	Tube furnace set to 150
11/9/2012	11:41:02 AM	H2 valve closed
11/9/2012	11:41:02 AM	BCl3 valve closed
11/9/2012	11:41:02 AM	PH3 valve closed
11/9/2012	11:41:02 AM	SiCl4 pre valve closed
11/9/2012	11:41:02 AM	SiCl4 post valve closed
11/9/2012	11:41:02 AM	Bypass valve closed
11/9/2012	11:41:02 AM	Bubbler valve closed
11/9/2012	11:41:02 AM	Helium valve opened
11/9/2012	11:41:02 AM	Main Vac valve opened
11/9/2012	11:41:02 AM	Helium MFC set to  20.000000
11/9/2012	11:41:02 AM	H2 MFC set to  0.000000
11/9/2012	11:41:02 AM	BCl3 MFC set to  0.000000
11/9/2012	11:41:02 AM	PH3 MFC set to  0.000000
11/9/2012	11:41:02 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:41:02 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:41:02 AM	Tube furnace set to 150
11/9/2012	11:41:32 AM	Helium valve closed
11/9/2012	11:41:32 AM	H2 valve closed
11/9/2012	11:41:32 AM	BCl3 valve closed
11/9/2012	11:41:32 AM	PH3 valve closed
11/9/2012	11:41:32 AM	SiCl4 pre valve closed
11/9/2012	11:41:32 AM	SiCl4 post valve closed
11/9/2012	11:41:32 AM	Bypass valve closed
11/9/2012	11:41:32 AM	Bubbler valve closed
11/9/2012	11:41:32 AM	Main Vac valve opened
11/9/2012	11:41:32 AM	Helium MFC set to  0.000000
11/9/2012	11:41:32 AM	H2 MFC set to  0.000000
11/9/2012	11:41:32 AM	BCl3 MFC set to  0.000000
11/9/2012	11:41:32 AM	PH3 MFC set to  0.000000
11/9/2012	11:41:32 AM	SiCl4 MFC set to  0.000000
11/9/2012	11:41:32 AM	Bypass solenoid MFC set to  0.000000
11/9/2012	11:41:33 AM	Tube furnace set to 150
11/9/2012	11:41:34 AM	Run finished at 11:41 AM
11/9/2012	12:22:44 PM	Main Vac valve closed
11/9/2012	12:22:56 PM	Main Vac valve opened
11/9/2012	12:23:00 PM	Helium MFC set to  10.000000
11/9/2012	12:23:02 PM	Helium valve opened
11/9/2012	12:23:17 PM	Helium valve closed
11/9/2012	12:23:47 PM	Recipe started at 12:23 PM
11/9/2012	12:23:47 PM	Helium valve closed
11/9/2012	12:23:47 PM	H2 valve closed
11/9/2012	12:23:47 PM	BCl3 valve closed
11/9/2012	12:23:47 PM	PH3 valve closed
11/9/2012	12:23:47 PM	SiCl4 pre valve closed
11/9/2012	12:23:47 PM	SiCl4 post valve closed
11/9/2012	12:23:47 PM	Bypass valve closed
11/9/2012	12:23:47 PM	Bubbler valve closed
11/9/2012	12:23:47 PM	Main Vac valve opened
11/9/2012	12:23:47 PM	Helium MFC set to  0.000000
11/9/2012	12:23:47 PM	H2 MFC set to  0.000000
11/9/2012	12:23:47 PM	BCl3 MFC set to  0.000000
11/9/2012	12:23:47 PM	PH3 MFC set to  0.000000
11/9/2012	12:23:47 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:23:47 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:23:47 PM	Tube furnace set to 150
11/9/2012	12:23:49 PM	Run aborted at 12:23 PM
11/9/2012	12:23:49 PM	Helium valve closed
11/9/2012	12:23:49 PM	H2 valve closed
11/9/2012	12:23:49 PM	BCl3 valve closed
11/9/2012	12:23:49 PM	PH3 valve closed
11/9/2012	12:23:49 PM	SiCl4 pre valve closed
11/9/2012	12:23:49 PM	SiCl4 post valve closed
11/9/2012	12:23:49 PM	Bypass valve closed
11/9/2012	12:23:49 PM	Main Vac valve closed
11/9/2012	12:23:49 PM	Bubbler valve closed
11/9/2012	12:23:49 PM	Helium MFC set to  0.000000
11/9/2012	12:23:49 PM	H2 MFC set to  0.000000
11/9/2012	12:23:49 PM	BCl3 MFC set to  0.000000
11/9/2012	12:23:49 PM	PH3 MFC set to  0.000000
11/9/2012	12:23:49 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:23:49 PM	Tube furnace set to 0
11/9/2012	12:23:50 PM	Main Vac valve opened
11/9/2012	12:25:24 PM	Recipe started at 12:25 PM
11/9/2012	12:25:24 PM	Helium valve closed
11/9/2012	12:25:24 PM	H2 valve closed
11/9/2012	12:25:24 PM	BCl3 valve closed
11/9/2012	12:25:24 PM	PH3 valve closed
11/9/2012	12:25:24 PM	SiCl4 pre valve closed
11/9/2012	12:25:24 PM	SiCl4 post valve closed
11/9/2012	12:25:24 PM	Main Vac valve closed
11/9/2012	12:25:24 PM	Bypass valve closed
11/9/2012	12:25:24 PM	Bubbler valve closed
11/9/2012	12:25:24 PM	Helium MFC set to  0.000000
11/9/2012	12:25:24 PM	H2 MFC set to  0.000000
11/9/2012	12:25:24 PM	BCl3 MFC set to  0.000000
11/9/2012	12:25:24 PM	PH3 MFC set to  0.000000
11/9/2012	12:25:24 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:25:24 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:25:25 PM	Tube furnace set to 150
11/9/2012	12:25:28 PM	Helium valve closed
11/9/2012	12:25:28 PM	BCl3 valve closed
11/9/2012	12:25:28 PM	PH3 valve closed
11/9/2012	12:25:28 PM	SiCl4 pre valve closed
11/9/2012	12:25:28 PM	SiCl4 post valve closed
11/9/2012	12:25:28 PM	Main Vac valve closed
11/9/2012	12:25:28 PM	Bypass valve closed
11/9/2012	12:25:28 PM	Bubbler valve closed
11/9/2012	12:25:28 PM	H2 valve opened
11/9/2012	12:25:28 PM	Helium MFC set to  0.000000
11/9/2012	12:25:28 PM	H2 MFC set to  500.000000
11/9/2012	12:25:28 PM	BCl3 MFC set to  0.000000
11/9/2012	12:25:28 PM	PH3 MFC set to  0.000000
11/9/2012	12:25:28 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:25:28 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:25:28 PM	Tube furnace set to 150
11/9/2012	12:26:40 PM	Helium valve closed
11/9/2012	12:26:40 PM	BCl3 valve closed
11/9/2012	12:26:40 PM	PH3 valve closed
11/9/2012	12:26:40 PM	SiCl4 pre valve closed
11/9/2012	12:26:40 PM	SiCl4 post valve closed
11/9/2012	12:26:40 PM	Main Vac valve closed
11/9/2012	12:26:40 PM	Bypass valve closed
11/9/2012	12:26:40 PM	H2 valve opened
11/9/2012	12:26:40 PM	Bubbler valve opened
11/9/2012	12:26:40 PM	Helium MFC set to  0.000000
11/9/2012	12:26:40 PM	H2 MFC set to  500.000000
11/9/2012	12:26:40 PM	BCl3 MFC set to  0.000000
11/9/2012	12:26:40 PM	PH3 MFC set to  0.000000
11/9/2012	12:26:40 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:26:40 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:26:40 PM	Tube furnace set to 150
11/9/2012	12:26:41 PM	Helium valve closed
11/9/2012	12:26:41 PM	BCl3 valve closed
11/9/2012	12:26:41 PM	PH3 valve closed
11/9/2012	12:26:41 PM	SiCl4 pre valve closed
11/9/2012	12:26:41 PM	SiCl4 post valve closed
11/9/2012	12:26:41 PM	Main Vac valve closed
11/9/2012	12:26:41 PM	Bypass valve closed
11/9/2012	12:26:41 PM	H2 valve opened
11/9/2012	12:26:41 PM	Bubbler valve opened
11/9/2012	12:26:41 PM	Helium MFC set to  0.000000
11/9/2012	12:26:41 PM	H2 MFC set to  500.000000
11/9/2012	12:26:41 PM	BCl3 MFC set to  0.000000
11/9/2012	12:26:41 PM	PH3 MFC set to  0.000000
11/9/2012	12:26:41 PM	SiCl4 MFC set to  0.000000
11/9/2012	12:26:41 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:26:42 PM	Tube furnace set to 1000
11/9/2012	12:46:42 PM	Helium valve closed
11/9/2012	12:46:42 PM	PH3 valve closed
11/9/2012	12:46:42 PM	Main Vac valve closed
11/9/2012	12:46:42 PM	Bypass valve closed
11/9/2012	12:46:42 PM	H2 valve opened
11/9/2012	12:46:42 PM	BCl3 valve opened
11/9/2012	12:46:42 PM	SiCl4 pre valve opened
11/9/2012	12:46:42 PM	SiCl4 post valve opened
11/9/2012	12:46:42 PM	Bubbler valve opened
11/9/2012	12:46:42 PM	Helium MFC set to  0.000000
11/9/2012	12:46:42 PM	H2 MFC set to  450.000000
11/9/2012	12:46:42 PM	BCl3 MFC set to  1.500000
11/9/2012	12:46:42 PM	PH3 MFC set to  0.000000
11/9/2012	12:46:42 PM	SiCl4 MFC set to  50.000000
11/9/2012	12:46:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	12:46:42 PM	Tube furnace set to 1000
11/9/2012	1:01:42 PM	Helium valve closed
11/9/2012	1:01:42 PM	BCl3 valve closed
11/9/2012	1:01:42 PM	Main Vac valve closed
11/9/2012	1:01:42 PM	Bypass valve closed
11/9/2012	1:01:42 PM	H2 valve opened
11/9/2012	1:01:42 PM	PH3 valve opened
11/9/2012	1:01:42 PM	SiCl4 pre valve opened
11/9/2012	1:01:42 PM	SiCl4 post valve opened
11/9/2012	1:01:42 PM	Bubbler valve opened
11/9/2012	1:01:42 PM	Helium MFC set to  0.000000
11/9/2012	1:01:42 PM	H2 MFC set to  450.000000
11/9/2012	1:01:42 PM	BCl3 MFC set to  0.000000
11/9/2012	1:01:42 PM	PH3 MFC set to  20.000000
11/9/2012	1:01:42 PM	SiCl4 MFC set to  50.000000
11/9/2012	1:01:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:01:42 PM	Tube furnace set to 1000
11/9/2012	1:06:42 PM	Helium valve closed
11/9/2012	1:06:42 PM	BCl3 valve closed
11/9/2012	1:06:42 PM	PH3 valve closed
11/9/2012	1:06:42 PM	SiCl4 pre valve closed
11/9/2012	1:06:42 PM	SiCl4 post valve closed
11/9/2012	1:06:42 PM	Main Vac valve closed
11/9/2012	1:06:42 PM	Bypass valve closed
11/9/2012	1:06:42 PM	H2 valve opened
11/9/2012	1:06:42 PM	Bubbler valve opened
11/9/2012	1:06:42 PM	Helium MFC set to  0.000000
11/9/2012	1:06:42 PM	H2 MFC set to  500.000000
11/9/2012	1:06:42 PM	BCl3 MFC set to  0.000000
11/9/2012	1:06:42 PM	PH3 MFC set to  0.000000
11/9/2012	1:06:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:06:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:06:42 PM	Tube furnace set to 950
11/9/2012	1:09:42 PM	Helium valve closed
11/9/2012	1:09:42 PM	BCl3 valve closed
11/9/2012	1:09:42 PM	PH3 valve closed
11/9/2012	1:09:42 PM	SiCl4 pre valve closed
11/9/2012	1:09:42 PM	SiCl4 post valve closed
11/9/2012	1:09:42 PM	Main Vac valve closed
11/9/2012	1:09:42 PM	Bypass valve closed
11/9/2012	1:09:42 PM	H2 valve opened
11/9/2012	1:09:42 PM	Bubbler valve opened
11/9/2012	1:09:42 PM	Helium MFC set to  0.000000
11/9/2012	1:09:42 PM	H2 MFC set to  500.000000
11/9/2012	1:09:42 PM	BCl3 MFC set to  0.000000
11/9/2012	1:09:42 PM	PH3 MFC set to  0.000000
11/9/2012	1:09:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:09:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:09:42 PM	Tube furnace set to 900
11/9/2012	1:12:42 PM	Helium valve closed
11/9/2012	1:12:42 PM	BCl3 valve closed
11/9/2012	1:12:42 PM	PH3 valve closed
11/9/2012	1:12:42 PM	SiCl4 pre valve closed
11/9/2012	1:12:42 PM	SiCl4 post valve closed
11/9/2012	1:12:42 PM	Main Vac valve closed
11/9/2012	1:12:42 PM	Bypass valve closed
11/9/2012	1:12:42 PM	H2 valve opened
11/9/2012	1:12:42 PM	Bubbler valve opened
11/9/2012	1:12:42 PM	Helium MFC set to  0.000000
11/9/2012	1:12:42 PM	H2 MFC set to  500.000000
11/9/2012	1:12:42 PM	BCl3 MFC set to  0.000000
11/9/2012	1:12:42 PM	PH3 MFC set to  0.000000
11/9/2012	1:12:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:12:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:12:43 PM	Tube furnace set to 850
11/9/2012	1:15:43 PM	Helium valve closed
11/9/2012	1:15:43 PM	BCl3 valve closed
11/9/2012	1:15:43 PM	PH3 valve closed
11/9/2012	1:15:43 PM	SiCl4 pre valve closed
11/9/2012	1:15:43 PM	SiCl4 post valve closed
11/9/2012	1:15:43 PM	Main Vac valve closed
11/9/2012	1:15:43 PM	Bypass valve closed
11/9/2012	1:15:43 PM	H2 valve opened
11/9/2012	1:15:43 PM	Bubbler valve opened
11/9/2012	1:15:43 PM	Helium MFC set to  0.000000
11/9/2012	1:15:43 PM	H2 MFC set to  500.000000
11/9/2012	1:15:43 PM	BCl3 MFC set to  0.000000
11/9/2012	1:15:43 PM	PH3 MFC set to  0.000000
11/9/2012	1:15:43 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:15:43 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:15:43 PM	Tube furnace set to 800
11/9/2012	1:18:43 PM	Helium valve closed
11/9/2012	1:18:43 PM	BCl3 valve closed
11/9/2012	1:18:43 PM	PH3 valve closed
11/9/2012	1:18:43 PM	SiCl4 pre valve closed
11/9/2012	1:18:43 PM	SiCl4 post valve closed
11/9/2012	1:18:43 PM	Main Vac valve closed
11/9/2012	1:18:43 PM	Bypass valve closed
11/9/2012	1:18:43 PM	H2 valve opened
11/9/2012	1:18:43 PM	Bubbler valve opened
11/9/2012	1:18:43 PM	Helium MFC set to  0.000000
11/9/2012	1:18:43 PM	H2 MFC set to  500.000000
11/9/2012	1:18:43 PM	BCl3 MFC set to  0.000000
11/9/2012	1:18:43 PM	PH3 MFC set to  0.000000
11/9/2012	1:18:43 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:18:43 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:18:43 PM	Tube furnace set to 750
11/9/2012	1:21:43 PM	H2 valve closed
11/9/2012	1:21:43 PM	BCl3 valve closed
11/9/2012	1:21:43 PM	PH3 valve closed
11/9/2012	1:21:43 PM	SiCl4 pre valve closed
11/9/2012	1:21:43 PM	SiCl4 post valve closed
11/9/2012	1:21:43 PM	Main Vac valve closed
11/9/2012	1:21:43 PM	Bypass valve closed
11/9/2012	1:21:43 PM	Helium valve opened
11/9/2012	1:21:43 PM	Bubbler valve opened
11/9/2012	1:21:43 PM	Helium MFC set to  500.000000
11/9/2012	1:21:43 PM	H2 MFC set to  0.000000
11/9/2012	1:21:43 PM	BCl3 MFC set to  0.000000
11/9/2012	1:21:43 PM	PH3 MFC set to  0.000000
11/9/2012	1:21:43 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:21:43 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:21:43 PM	Tube furnace set to 0
11/9/2012	1:41:43 PM	Helium valve closed
11/9/2012	1:41:43 PM	H2 valve closed
11/9/2012	1:41:43 PM	BCl3 valve closed
11/9/2012	1:41:43 PM	PH3 valve closed
11/9/2012	1:41:43 PM	SiCl4 pre valve closed
11/9/2012	1:41:43 PM	SiCl4 post valve closed
11/9/2012	1:41:43 PM	Main Vac valve closed
11/9/2012	1:41:43 PM	Bypass valve closed
11/9/2012	1:41:43 PM	Bubbler valve closed
11/9/2012	1:41:43 PM	Helium MFC set to  0.000000
11/9/2012	1:41:43 PM	H2 MFC set to  0.000000
11/9/2012	1:41:43 PM	BCl3 MFC set to  0.000000
11/9/2012	1:41:43 PM	PH3 MFC set to  0.000000
11/9/2012	1:41:43 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:41:43 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:41:44 PM	Tube furnace set to 0
11/9/2012	1:41:45 PM	Run finished at 1:41 PM
11/9/2012	1:55:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	1:55:52 PM	Recipe started at 1:55 PM
11/9/2012	1:55:52 PM	Helium valve closed
11/9/2012	1:55:53 PM	H2 valve closed
11/9/2012	1:55:53 PM	BCl3 valve closed
11/9/2012	1:55:53 PM	PH3 valve closed
11/9/2012	1:55:53 PM	SiCl4 pre valve closed
11/9/2012	1:55:53 PM	SiCl4 post valve closed
11/9/2012	1:55:53 PM	Main Vac valve closed
11/9/2012	1:55:53 PM	Bypass valve closed
11/9/2012	1:55:53 PM	Bubbler valve closed
11/9/2012	1:55:53 PM	Helium MFC set to  0.000000
11/9/2012	1:55:53 PM	H2 MFC set to  0.000000
11/9/2012	1:55:53 PM	BCl3 MFC set to  0.000000
11/9/2012	1:55:53 PM	PH3 MFC set to  0.000000
11/9/2012	1:55:53 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:55:53 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:55:53 PM	Tube furnace set to 0
11/9/2012	1:55:56 PM	H2 valve closed
11/9/2012	1:55:56 PM	BCl3 valve closed
11/9/2012	1:55:56 PM	PH3 valve closed
11/9/2012	1:55:56 PM	SiCl4 pre valve closed
11/9/2012	1:55:56 PM	SiCl4 post valve closed
11/9/2012	1:55:56 PM	Main Vac valve closed
11/9/2012	1:55:56 PM	Bypass valve closed
11/9/2012	1:55:56 PM	Bubbler valve closed
11/9/2012	1:55:56 PM	Helium valve opened
11/9/2012	1:55:56 PM	Helium MFC set to  500.000000
11/9/2012	1:55:56 PM	H2 MFC set to  0.000000
11/9/2012	1:55:56 PM	BCl3 MFC set to  0.000000
11/9/2012	1:55:56 PM	PH3 MFC set to  0.000000
11/9/2012	1:55:56 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:55:56 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:55:56 PM	Tube furnace set to 0
11/9/2012	1:55:56 PM	Helium valve closed
11/9/2012	1:55:56 PM	H2 valve closed
11/9/2012	1:55:56 PM	BCl3 valve closed
11/9/2012	1:55:56 PM	PH3 valve closed
11/9/2012	1:55:56 PM	SiCl4 pre valve closed
11/9/2012	1:55:56 PM	SiCl4 post valve closed
11/9/2012	1:55:56 PM	Main Vac valve closed
11/9/2012	1:55:56 PM	Bypass valve closed
11/9/2012	1:55:56 PM	Bubbler valve closed
11/9/2012	1:55:56 PM	Helium MFC set to  0.000000
11/9/2012	1:55:56 PM	H2 MFC set to  0.000000
11/9/2012	1:55:56 PM	BCl3 MFC set to  0.000000
11/9/2012	1:55:56 PM	PH3 MFC set to  0.000000
11/9/2012	1:55:56 PM	SiCl4 MFC set to  0.000000
11/9/2012	1:55:56 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	1:55:56 PM	Tube furnace set to 0
11/9/2012	1:55:57 PM	Run finished at 1:55 PM
11/9/2012	1:55:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	2:01:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	2:02:00 PM	Recipe started at 2:02 PM
11/9/2012	2:02:00 PM	Helium valve closed
11/9/2012	2:02:00 PM	H2 valve closed
11/9/2012	2:02:00 PM	BCl3 valve closed
11/9/2012	2:02:00 PM	PH3 valve closed
11/9/2012	2:02:00 PM	SiCl4 pre valve closed
11/9/2012	2:02:00 PM	SiCl4 post valve closed
11/9/2012	2:02:00 PM	Main Vac valve closed
11/9/2012	2:02:00 PM	Bubbler valve closed
11/9/2012	2:02:00 PM	Bypass valve opened
11/9/2012	2:02:00 PM	Helium MFC set to  0.000000
11/9/2012	2:02:00 PM	H2 MFC set to  0.000000
11/9/2012	2:02:00 PM	BCl3 MFC set to  0.000000
11/9/2012	2:02:00 PM	PH3 MFC set to  0.000000
11/9/2012	2:02:00 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:02:00 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:02:00 PM	Tube furnace set to 0
11/9/2012	2:03:17 PM	Helium valve closed
11/9/2012	2:03:17 PM	H2 valve closed
11/9/2012	2:03:17 PM	BCl3 valve closed
11/9/2012	2:03:17 PM	PH3 valve closed
11/9/2012	2:03:17 PM	SiCl4 pre valve closed
11/9/2012	2:03:17 PM	SiCl4 post valve closed
11/9/2012	2:03:17 PM	Main Vac valve closed
11/9/2012	2:03:17 PM	Bubbler valve closed
11/9/2012	2:03:17 PM	Bypass valve opened
11/9/2012	2:03:17 PM	Helium MFC set to  0.000000
11/9/2012	2:03:17 PM	H2 MFC set to  0.000000
11/9/2012	2:03:17 PM	BCl3 MFC set to  0.000000
11/9/2012	2:03:17 PM	PH3 MFC set to  0.000000
11/9/2012	2:03:17 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:03:17 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:03:17 PM	Tube furnace set to 0
11/9/2012	2:03:52 PM	Helium valve closed
11/9/2012	2:03:52 PM	H2 valve closed
11/9/2012	2:03:52 PM	BCl3 valve closed
11/9/2012	2:03:52 PM	PH3 valve closed
11/9/2012	2:03:52 PM	SiCl4 pre valve closed
11/9/2012	2:03:53 PM	SiCl4 post valve closed
11/9/2012	2:03:53 PM	Bypass valve closed
11/9/2012	2:03:53 PM	Bubbler valve closed
11/9/2012	2:03:53 PM	Main Vac valve opened
11/9/2012	2:03:53 PM	Helium MFC set to  0.000000
11/9/2012	2:03:53 PM	H2 MFC set to  0.000000
11/9/2012	2:03:53 PM	BCl3 MFC set to  0.000000
11/9/2012	2:03:53 PM	PH3 MFC set to  0.000000
11/9/2012	2:03:53 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:03:53 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:03:53 PM	Tube furnace set to 0
11/9/2012	2:03:54 PM	Run finished at 2:03 PM
11/9/2012	2:03:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	2:06:25 PM	Recipe started at 2:06 PM
11/9/2012	2:06:25 PM	Helium valve closed
11/9/2012	2:06:25 PM	H2 valve closed
11/9/2012	2:06:25 PM	BCl3 valve closed
11/9/2012	2:06:25 PM	PH3 valve closed
11/9/2012	2:06:25 PM	SiCl4 pre valve closed
11/9/2012	2:06:25 PM	SiCl4 post valve closed
11/9/2012	2:06:25 PM	Bypass valve closed
11/9/2012	2:06:25 PM	Bubbler valve closed
11/9/2012	2:06:25 PM	Main Vac valve opened
11/9/2012	2:06:25 PM	Helium MFC set to  0.000000
11/9/2012	2:06:25 PM	H2 MFC set to  0.000000
11/9/2012	2:06:25 PM	BCl3 MFC set to  0.000000
11/9/2012	2:06:25 PM	PH3 MFC set to  0.000000
11/9/2012	2:06:25 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:06:25 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:06:25 PM	Tube furnace set to 150
11/9/2012	2:06:30 PM	H2 valve closed
11/9/2012	2:06:30 PM	BCl3 valve closed
11/9/2012	2:06:30 PM	PH3 valve closed
11/9/2012	2:06:30 PM	SiCl4 pre valve closed
11/9/2012	2:06:30 PM	SiCl4 post valve closed
11/9/2012	2:06:30 PM	Bypass valve closed
11/9/2012	2:06:30 PM	Bubbler valve closed
11/9/2012	2:06:30 PM	Helium valve opened
11/9/2012	2:06:30 PM	Main Vac valve opened
11/9/2012	2:06:30 PM	Helium MFC set to  20.000000
11/9/2012	2:06:30 PM	H2 MFC set to  0.000000
11/9/2012	2:06:30 PM	BCl3 MFC set to  0.000000
11/9/2012	2:06:30 PM	PH3 MFC set to  0.000000
11/9/2012	2:06:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:06:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:06:30 PM	Tube furnace set to 150
11/9/2012	2:07:00 PM	Helium valve closed
11/9/2012	2:07:00 PM	H2 valve closed
11/9/2012	2:07:00 PM	BCl3 valve closed
11/9/2012	2:07:00 PM	PH3 valve closed
11/9/2012	2:07:00 PM	SiCl4 pre valve closed
11/9/2012	2:07:00 PM	SiCl4 post valve closed
11/9/2012	2:07:00 PM	Bypass valve closed
11/9/2012	2:07:00 PM	Bubbler valve closed
11/9/2012	2:07:00 PM	Main Vac valve opened
11/9/2012	2:07:00 PM	Helium MFC set to  0.000000
11/9/2012	2:07:00 PM	H2 MFC set to  0.000000
11/9/2012	2:07:00 PM	BCl3 MFC set to  0.000000
11/9/2012	2:07:00 PM	PH3 MFC set to  0.000000
11/9/2012	2:07:00 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:07:00 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:07:00 PM	Tube furnace set to 150
11/9/2012	2:07:30 PM	H2 valve closed
11/9/2012	2:07:30 PM	BCl3 valve closed
11/9/2012	2:07:30 PM	PH3 valve closed
11/9/2012	2:07:30 PM	SiCl4 pre valve closed
11/9/2012	2:07:30 PM	SiCl4 post valve closed
11/9/2012	2:07:30 PM	Bypass valve closed
11/9/2012	2:07:30 PM	Bubbler valve closed
11/9/2012	2:07:30 PM	Helium valve opened
11/9/2012	2:07:30 PM	Main Vac valve opened
11/9/2012	2:07:30 PM	Helium MFC set to  20.000000
11/9/2012	2:07:30 PM	H2 MFC set to  0.000000
11/9/2012	2:07:30 PM	BCl3 MFC set to  0.000000
11/9/2012	2:07:30 PM	PH3 MFC set to  0.000000
11/9/2012	2:07:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:07:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:07:31 PM	Tube furnace set to 150
11/9/2012	2:08:01 PM	Helium valve closed
11/9/2012	2:08:01 PM	H2 valve closed
11/9/2012	2:08:01 PM	BCl3 valve closed
11/9/2012	2:08:01 PM	PH3 valve closed
11/9/2012	2:08:01 PM	SiCl4 pre valve closed
11/9/2012	2:08:01 PM	SiCl4 post valve closed
11/9/2012	2:08:01 PM	Bypass valve closed
11/9/2012	2:08:01 PM	Bubbler valve closed
11/9/2012	2:08:01 PM	Main Vac valve opened
11/9/2012	2:08:01 PM	Helium MFC set to  0.000000
11/9/2012	2:08:01 PM	H2 MFC set to  0.000000
11/9/2012	2:08:01 PM	BCl3 MFC set to  0.000000
11/9/2012	2:08:01 PM	PH3 MFC set to  0.000000
11/9/2012	2:08:01 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:08:01 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:08:01 PM	Tube furnace set to 150
11/9/2012	2:08:31 PM	H2 valve closed
11/9/2012	2:08:31 PM	BCl3 valve closed
11/9/2012	2:08:31 PM	PH3 valve closed
11/9/2012	2:08:31 PM	SiCl4 pre valve closed
11/9/2012	2:08:31 PM	SiCl4 post valve closed
11/9/2012	2:08:31 PM	Bypass valve closed
11/9/2012	2:08:31 PM	Bubbler valve closed
11/9/2012	2:08:31 PM	Helium valve opened
11/9/2012	2:08:31 PM	Main Vac valve opened
11/9/2012	2:08:31 PM	Helium MFC set to  20.000000
11/9/2012	2:08:31 PM	H2 MFC set to  0.000000
11/9/2012	2:08:31 PM	BCl3 MFC set to  0.000000
11/9/2012	2:08:31 PM	PH3 MFC set to  0.000000
11/9/2012	2:08:31 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:08:31 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:08:31 PM	Tube furnace set to 150
11/9/2012	2:09:01 PM	Helium valve closed
11/9/2012	2:09:01 PM	H2 valve closed
11/9/2012	2:09:01 PM	BCl3 valve closed
11/9/2012	2:09:01 PM	PH3 valve closed
11/9/2012	2:09:01 PM	SiCl4 pre valve closed
11/9/2012	2:09:01 PM	SiCl4 post valve closed
11/9/2012	2:09:01 PM	Bypass valve closed
11/9/2012	2:09:01 PM	Bubbler valve closed
11/9/2012	2:09:01 PM	Main Vac valve opened
11/9/2012	2:09:01 PM	Helium MFC set to  0.000000
11/9/2012	2:09:01 PM	H2 MFC set to  0.000000
11/9/2012	2:09:01 PM	BCl3 MFC set to  0.000000
11/9/2012	2:09:01 PM	PH3 MFC set to  0.000000
11/9/2012	2:09:01 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:09:01 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:09:01 PM	Tube furnace set to 150
11/9/2012	2:09:31 PM	H2 valve closed
11/9/2012	2:09:31 PM	BCl3 valve closed
11/9/2012	2:09:31 PM	PH3 valve closed
11/9/2012	2:09:31 PM	SiCl4 pre valve closed
11/9/2012	2:09:31 PM	SiCl4 post valve closed
11/9/2012	2:09:31 PM	Bypass valve closed
11/9/2012	2:09:31 PM	Bubbler valve closed
11/9/2012	2:09:31 PM	Helium valve opened
11/9/2012	2:09:31 PM	Main Vac valve opened
11/9/2012	2:09:31 PM	Helium MFC set to  20.000000
11/9/2012	2:09:31 PM	H2 MFC set to  0.000000
11/9/2012	2:09:31 PM	BCl3 MFC set to  0.000000
11/9/2012	2:09:31 PM	PH3 MFC set to  0.000000
11/9/2012	2:09:31 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:09:31 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:09:32 PM	Tube furnace set to 150
11/9/2012	2:10:02 PM	Helium valve closed
11/9/2012	2:10:02 PM	H2 valve closed
11/9/2012	2:10:02 PM	BCl3 valve closed
11/9/2012	2:10:02 PM	PH3 valve closed
11/9/2012	2:10:02 PM	SiCl4 pre valve closed
11/9/2012	2:10:02 PM	SiCl4 post valve closed
11/9/2012	2:10:02 PM	Bypass valve closed
11/9/2012	2:10:02 PM	Bubbler valve closed
11/9/2012	2:10:02 PM	Main Vac valve opened
11/9/2012	2:10:02 PM	Helium MFC set to  0.000000
11/9/2012	2:10:02 PM	H2 MFC set to  0.000000
11/9/2012	2:10:02 PM	BCl3 MFC set to  0.000000
11/9/2012	2:10:02 PM	PH3 MFC set to  0.000000
11/9/2012	2:10:02 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:10:02 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:10:02 PM	Tube furnace set to 150
11/9/2012	2:10:32 PM	H2 valve closed
11/9/2012	2:10:32 PM	BCl3 valve closed
11/9/2012	2:10:32 PM	PH3 valve closed
11/9/2012	2:10:32 PM	SiCl4 pre valve closed
11/9/2012	2:10:32 PM	SiCl4 post valve closed
11/9/2012	2:10:32 PM	Bypass valve closed
11/9/2012	2:10:32 PM	Bubbler valve closed
11/9/2012	2:10:32 PM	Helium valve opened
11/9/2012	2:10:32 PM	Main Vac valve opened
11/9/2012	2:10:32 PM	Helium MFC set to  20.000000
11/9/2012	2:10:32 PM	H2 MFC set to  0.000000
11/9/2012	2:10:32 PM	BCl3 MFC set to  0.000000
11/9/2012	2:10:32 PM	PH3 MFC set to  0.000000
11/9/2012	2:10:32 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:10:32 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:10:32 PM	Tube furnace set to 150
11/9/2012	2:11:02 PM	Helium valve closed
11/9/2012	2:11:02 PM	H2 valve closed
11/9/2012	2:11:02 PM	BCl3 valve closed
11/9/2012	2:11:02 PM	PH3 valve closed
11/9/2012	2:11:02 PM	SiCl4 pre valve closed
11/9/2012	2:11:02 PM	SiCl4 post valve closed
11/9/2012	2:11:02 PM	Bypass valve closed
11/9/2012	2:11:02 PM	Bubbler valve closed
11/9/2012	2:11:02 PM	Main Vac valve opened
11/9/2012	2:11:02 PM	Helium MFC set to  0.000000
11/9/2012	2:11:02 PM	H2 MFC set to  0.000000
11/9/2012	2:11:02 PM	BCl3 MFC set to  0.000000
11/9/2012	2:11:02 PM	PH3 MFC set to  0.000000
11/9/2012	2:11:02 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:11:02 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:11:02 PM	Tube furnace set to 150
11/9/2012	2:11:32 PM	H2 valve closed
11/9/2012	2:11:32 PM	BCl3 valve closed
11/9/2012	2:11:32 PM	PH3 valve closed
11/9/2012	2:11:32 PM	SiCl4 pre valve closed
11/9/2012	2:11:32 PM	SiCl4 post valve closed
11/9/2012	2:11:32 PM	Bypass valve closed
11/9/2012	2:11:32 PM	Bubbler valve closed
11/9/2012	2:11:32 PM	Helium valve opened
11/9/2012	2:11:32 PM	Main Vac valve opened
11/9/2012	2:11:32 PM	Helium MFC set to  20.000000
11/9/2012	2:11:32 PM	H2 MFC set to  0.000000
11/9/2012	2:11:32 PM	BCl3 MFC set to  0.000000
11/9/2012	2:11:32 PM	PH3 MFC set to  0.000000
11/9/2012	2:11:32 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:11:32 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:11:33 PM	Tube furnace set to 150
11/9/2012	2:12:03 PM	Helium valve closed
11/9/2012	2:12:03 PM	H2 valve closed
11/9/2012	2:12:03 PM	BCl3 valve closed
11/9/2012	2:12:03 PM	PH3 valve closed
11/9/2012	2:12:03 PM	SiCl4 pre valve closed
11/9/2012	2:12:03 PM	SiCl4 post valve closed
11/9/2012	2:12:03 PM	Bypass valve closed
11/9/2012	2:12:03 PM	Bubbler valve closed
11/9/2012	2:12:03 PM	Main Vac valve opened
11/9/2012	2:12:03 PM	Helium MFC set to  0.000000
11/9/2012	2:12:03 PM	H2 MFC set to  0.000000
11/9/2012	2:12:03 PM	BCl3 MFC set to  0.000000
11/9/2012	2:12:03 PM	PH3 MFC set to  0.000000
11/9/2012	2:12:03 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:12:03 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:12:03 PM	Tube furnace set to 150
11/9/2012	2:12:33 PM	H2 valve closed
11/9/2012	2:12:33 PM	BCl3 valve closed
11/9/2012	2:12:33 PM	PH3 valve closed
11/9/2012	2:12:33 PM	SiCl4 pre valve closed
11/9/2012	2:12:33 PM	SiCl4 post valve closed
11/9/2012	2:12:33 PM	Bypass valve closed
11/9/2012	2:12:33 PM	Bubbler valve closed
11/9/2012	2:12:33 PM	Helium valve opened
11/9/2012	2:12:33 PM	Main Vac valve opened
11/9/2012	2:12:33 PM	Helium MFC set to  20.000000
11/9/2012	2:12:33 PM	H2 MFC set to  0.000000
11/9/2012	2:12:33 PM	BCl3 MFC set to  0.000000
11/9/2012	2:12:33 PM	PH3 MFC set to  0.000000
11/9/2012	2:12:33 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:12:33 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:12:33 PM	Tube furnace set to 150
11/9/2012	2:13:03 PM	Helium valve closed
11/9/2012	2:13:03 PM	H2 valve closed
11/9/2012	2:13:03 PM	BCl3 valve closed
11/9/2012	2:13:03 PM	PH3 valve closed
11/9/2012	2:13:03 PM	SiCl4 pre valve closed
11/9/2012	2:13:03 PM	SiCl4 post valve closed
11/9/2012	2:13:03 PM	Bypass valve closed
11/9/2012	2:13:03 PM	Bubbler valve closed
11/9/2012	2:13:03 PM	Main Vac valve opened
11/9/2012	2:13:03 PM	Helium MFC set to  0.000000
11/9/2012	2:13:03 PM	H2 MFC set to  0.000000
11/9/2012	2:13:03 PM	BCl3 MFC set to  0.000000
11/9/2012	2:13:03 PM	PH3 MFC set to  0.000000
11/9/2012	2:13:03 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:13:03 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:13:03 PM	Tube furnace set to 150
11/9/2012	2:13:33 PM	H2 valve closed
11/9/2012	2:13:33 PM	BCl3 valve closed
11/9/2012	2:13:33 PM	PH3 valve closed
11/9/2012	2:13:33 PM	SiCl4 pre valve closed
11/9/2012	2:13:33 PM	SiCl4 post valve closed
11/9/2012	2:13:33 PM	Bypass valve closed
11/9/2012	2:13:33 PM	Bubbler valve closed
11/9/2012	2:13:33 PM	Helium valve opened
11/9/2012	2:13:33 PM	Main Vac valve opened
11/9/2012	2:13:33 PM	Helium MFC set to  20.000000
11/9/2012	2:13:33 PM	H2 MFC set to  0.000000
11/9/2012	2:13:33 PM	BCl3 MFC set to  0.000000
11/9/2012	2:13:33 PM	PH3 MFC set to  0.000000
11/9/2012	2:13:33 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:13:33 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:13:34 PM	Tube furnace set to 150
11/9/2012	2:14:04 PM	Helium valve closed
11/9/2012	2:14:04 PM	H2 valve closed
11/9/2012	2:14:04 PM	BCl3 valve closed
11/9/2012	2:14:04 PM	PH3 valve closed
11/9/2012	2:14:04 PM	SiCl4 pre valve closed
11/9/2012	2:14:04 PM	SiCl4 post valve closed
11/9/2012	2:14:04 PM	Bypass valve closed
11/9/2012	2:14:04 PM	Bubbler valve closed
11/9/2012	2:14:04 PM	Main Vac valve opened
11/9/2012	2:14:04 PM	Helium MFC set to  0.000000
11/9/2012	2:14:04 PM	H2 MFC set to  0.000000
11/9/2012	2:14:04 PM	BCl3 MFC set to  0.000000
11/9/2012	2:14:04 PM	PH3 MFC set to  0.000000
11/9/2012	2:14:04 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:14:04 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:14:04 PM	Tube furnace set to 150
11/9/2012	2:14:34 PM	H2 valve closed
11/9/2012	2:14:34 PM	BCl3 valve closed
11/9/2012	2:14:34 PM	PH3 valve closed
11/9/2012	2:14:34 PM	SiCl4 pre valve closed
11/9/2012	2:14:34 PM	SiCl4 post valve closed
11/9/2012	2:14:34 PM	Bypass valve closed
11/9/2012	2:14:34 PM	Bubbler valve closed
11/9/2012	2:14:34 PM	Helium valve opened
11/9/2012	2:14:34 PM	Main Vac valve opened
11/9/2012	2:14:34 PM	Helium MFC set to  20.000000
11/9/2012	2:14:34 PM	H2 MFC set to  0.000000
11/9/2012	2:14:34 PM	BCl3 MFC set to  0.000000
11/9/2012	2:14:34 PM	PH3 MFC set to  0.000000
11/9/2012	2:14:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:14:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:14:34 PM	Tube furnace set to 150
11/9/2012	2:15:04 PM	Helium valve closed
11/9/2012	2:15:04 PM	H2 valve closed
11/9/2012	2:15:04 PM	BCl3 valve closed
11/9/2012	2:15:04 PM	PH3 valve closed
11/9/2012	2:15:04 PM	SiCl4 pre valve closed
11/9/2012	2:15:04 PM	SiCl4 post valve closed
11/9/2012	2:15:04 PM	Bypass valve closed
11/9/2012	2:15:04 PM	Bubbler valve closed
11/9/2012	2:15:04 PM	Main Vac valve opened
11/9/2012	2:15:04 PM	Helium MFC set to  0.000000
11/9/2012	2:15:04 PM	H2 MFC set to  0.000000
11/9/2012	2:15:04 PM	BCl3 MFC set to  0.000000
11/9/2012	2:15:04 PM	PH3 MFC set to  0.000000
11/9/2012	2:15:04 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:15:04 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:15:04 PM	Tube furnace set to 150
11/9/2012	2:15:34 PM	H2 valve closed
11/9/2012	2:15:34 PM	BCl3 valve closed
11/9/2012	2:15:34 PM	PH3 valve closed
11/9/2012	2:15:34 PM	SiCl4 pre valve closed
11/9/2012	2:15:34 PM	SiCl4 post valve closed
11/9/2012	2:15:34 PM	Bypass valve closed
11/9/2012	2:15:34 PM	Bubbler valve closed
11/9/2012	2:15:34 PM	Helium valve opened
11/9/2012	2:15:34 PM	Main Vac valve opened
11/9/2012	2:15:34 PM	Helium MFC set to  20.000000
11/9/2012	2:15:34 PM	H2 MFC set to  0.000000
11/9/2012	2:15:34 PM	BCl3 MFC set to  0.000000
11/9/2012	2:15:34 PM	PH3 MFC set to  0.000000
11/9/2012	2:15:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:15:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:15:35 PM	Tube furnace set to 150
11/9/2012	2:16:05 PM	Helium valve closed
11/9/2012	2:16:05 PM	H2 valve closed
11/9/2012	2:16:05 PM	BCl3 valve closed
11/9/2012	2:16:05 PM	PH3 valve closed
11/9/2012	2:16:05 PM	SiCl4 pre valve closed
11/9/2012	2:16:05 PM	SiCl4 post valve closed
11/9/2012	2:16:05 PM	Bypass valve closed
11/9/2012	2:16:05 PM	Bubbler valve closed
11/9/2012	2:16:05 PM	Main Vac valve opened
11/9/2012	2:16:05 PM	Helium MFC set to  0.000000
11/9/2012	2:16:05 PM	H2 MFC set to  0.000000
11/9/2012	2:16:05 PM	BCl3 MFC set to  0.000000
11/9/2012	2:16:05 PM	PH3 MFC set to  0.000000
11/9/2012	2:16:05 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:16:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:16:05 PM	Tube furnace set to 150
11/9/2012	2:16:06 PM	Run finished at 2:16 PM
11/9/2012	2:36:11 PM	Main Vac valve closed
11/9/2012	2:36:26 PM	Main Vac valve opened
11/9/2012	2:37:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/9/2012	2:37:24 PM	Recipe started at 2:37 PM
11/9/2012	2:37:24 PM	Helium valve closed
11/9/2012	2:37:24 PM	H2 valve closed
11/9/2012	2:37:24 PM	BCl3 valve closed
11/9/2012	2:37:24 PM	PH3 valve closed
11/9/2012	2:37:24 PM	SiCl4 pre valve closed
11/9/2012	2:37:24 PM	SiCl4 post valve closed
11/9/2012	2:37:24 PM	Main Vac valve closed
11/9/2012	2:37:24 PM	Bubbler valve closed
11/9/2012	2:37:24 PM	Bypass valve opened
11/9/2012	2:37:24 PM	Helium MFC set to  0.000000
11/9/2012	2:37:24 PM	H2 MFC set to  0.000000
11/9/2012	2:37:24 PM	BCl3 MFC set to  0.000000
11/9/2012	2:37:24 PM	PH3 MFC set to  0.000000
11/9/2012	2:37:24 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:37:24 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:37:24 PM	Tube furnace set to 0
11/9/2012	2:37:25 PM	Run aborted at 2:37 PM
11/9/2012	2:37:25 PM	Helium valve closed
11/9/2012	2:37:25 PM	H2 valve closed
11/9/2012	2:37:25 PM	BCl3 valve closed
11/9/2012	2:37:25 PM	PH3 valve closed
11/9/2012	2:37:25 PM	SiCl4 pre valve closed
11/9/2012	2:37:25 PM	SiCl4 post valve closed
11/9/2012	2:37:25 PM	Bypass valve closed
11/9/2012	2:37:25 PM	Main Vac valve closed
11/9/2012	2:37:25 PM	Bubbler valve closed
11/9/2012	2:37:25 PM	Helium MFC set to  0.000000
11/9/2012	2:37:25 PM	H2 MFC set to  0.000000
11/9/2012	2:37:25 PM	BCl3 MFC set to  0.000000
11/9/2012	2:37:25 PM	PH3 MFC set to  0.000000
11/9/2012	2:37:25 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:37:25 PM	Tube furnace set to 0
11/9/2012	2:37:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/9/2012	2:37:27 PM	Main Vac valve opened
11/9/2012	2:37:37 PM	Recipe started at 2:37 PM
11/9/2012	2:37:37 PM	Helium valve closed
11/9/2012	2:37:37 PM	H2 valve closed
11/9/2012	2:37:37 PM	BCl3 valve closed
11/9/2012	2:37:37 PM	PH3 valve closed
11/9/2012	2:37:37 PM	SiCl4 pre valve closed
11/9/2012	2:37:37 PM	SiCl4 post valve closed
11/9/2012	2:37:37 PM	Bypass valve closed
11/9/2012	2:37:37 PM	Bubbler valve closed
11/9/2012	2:37:37 PM	Main Vac valve opened
11/9/2012	2:37:37 PM	Helium MFC set to  0.000000
11/9/2012	2:37:37 PM	H2 MFC set to  0.000000
11/9/2012	2:37:37 PM	BCl3 MFC set to  0.000000
11/9/2012	2:37:37 PM	PH3 MFC set to  0.000000
11/9/2012	2:37:37 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:37:37 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:37:37 PM	Tube furnace set to 150
11/9/2012	2:38:07 PM	H2 valve closed
11/9/2012	2:38:07 PM	BCl3 valve closed
11/9/2012	2:38:07 PM	PH3 valve closed
11/9/2012	2:38:07 PM	SiCl4 pre valve closed
11/9/2012	2:38:07 PM	SiCl4 post valve closed
11/9/2012	2:38:07 PM	Bypass valve closed
11/9/2012	2:38:07 PM	Bubbler valve closed
11/9/2012	2:38:07 PM	Helium valve opened
11/9/2012	2:38:07 PM	Main Vac valve opened
11/9/2012	2:38:07 PM	Helium MFC set to  20.000000
11/9/2012	2:38:07 PM	H2 MFC set to  0.000000
11/9/2012	2:38:07 PM	BCl3 MFC set to  0.000000
11/9/2012	2:38:07 PM	PH3 MFC set to  0.000000
11/9/2012	2:38:07 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:38:07 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:38:08 PM	Tube furnace set to 150
11/9/2012	2:38:38 PM	Helium valve closed
11/9/2012	2:38:38 PM	H2 valve closed
11/9/2012	2:38:38 PM	BCl3 valve closed
11/9/2012	2:38:38 PM	PH3 valve closed
11/9/2012	2:38:38 PM	SiCl4 pre valve closed
11/9/2012	2:38:38 PM	SiCl4 post valve closed
11/9/2012	2:38:38 PM	Bypass valve closed
11/9/2012	2:38:38 PM	Bubbler valve closed
11/9/2012	2:38:38 PM	Main Vac valve opened
11/9/2012	2:38:38 PM	Helium MFC set to  0.000000
11/9/2012	2:38:38 PM	H2 MFC set to  0.000000
11/9/2012	2:38:38 PM	BCl3 MFC set to  0.000000
11/9/2012	2:38:38 PM	PH3 MFC set to  0.000000
11/9/2012	2:38:38 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:38:38 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:38:38 PM	Tube furnace set to 150
11/9/2012	2:39:08 PM	H2 valve closed
11/9/2012	2:39:08 PM	BCl3 valve closed
11/9/2012	2:39:08 PM	PH3 valve closed
11/9/2012	2:39:08 PM	SiCl4 pre valve closed
11/9/2012	2:39:08 PM	SiCl4 post valve closed
11/9/2012	2:39:08 PM	Bypass valve closed
11/9/2012	2:39:08 PM	Bubbler valve closed
11/9/2012	2:39:08 PM	Helium valve opened
11/9/2012	2:39:08 PM	Main Vac valve opened
11/9/2012	2:39:08 PM	Helium MFC set to  20.000000
11/9/2012	2:39:08 PM	H2 MFC set to  0.000000
11/9/2012	2:39:08 PM	BCl3 MFC set to  0.000000
11/9/2012	2:39:08 PM	PH3 MFC set to  0.000000
11/9/2012	2:39:08 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:39:08 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:39:08 PM	Tube furnace set to 150
11/9/2012	2:39:38 PM	Helium valve closed
11/9/2012	2:39:38 PM	H2 valve closed
11/9/2012	2:39:38 PM	BCl3 valve closed
11/9/2012	2:39:38 PM	PH3 valve closed
11/9/2012	2:39:38 PM	SiCl4 pre valve closed
11/9/2012	2:39:38 PM	SiCl4 post valve closed
11/9/2012	2:39:38 PM	Bypass valve closed
11/9/2012	2:39:38 PM	Bubbler valve closed
11/9/2012	2:39:38 PM	Main Vac valve opened
11/9/2012	2:39:38 PM	Helium MFC set to  0.000000
11/9/2012	2:39:38 PM	H2 MFC set to  0.000000
11/9/2012	2:39:38 PM	BCl3 MFC set to  0.000000
11/9/2012	2:39:38 PM	PH3 MFC set to  0.000000
11/9/2012	2:39:38 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:39:38 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:39:38 PM	Tube furnace set to 150
11/9/2012	2:40:08 PM	H2 valve closed
11/9/2012	2:40:08 PM	BCl3 valve closed
11/9/2012	2:40:08 PM	PH3 valve closed
11/9/2012	2:40:08 PM	SiCl4 pre valve closed
11/9/2012	2:40:08 PM	SiCl4 post valve closed
11/9/2012	2:40:08 PM	Bypass valve closed
11/9/2012	2:40:08 PM	Bubbler valve closed
11/9/2012	2:40:08 PM	Helium valve opened
11/9/2012	2:40:08 PM	Main Vac valve opened
11/9/2012	2:40:08 PM	Helium MFC set to  20.000000
11/9/2012	2:40:08 PM	H2 MFC set to  0.000000
11/9/2012	2:40:08 PM	BCl3 MFC set to  0.000000
11/9/2012	2:40:08 PM	PH3 MFC set to  0.000000
11/9/2012	2:40:08 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:40:08 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:40:09 PM	Tube furnace set to 150
11/9/2012	2:40:39 PM	Helium valve closed
11/9/2012	2:40:39 PM	H2 valve closed
11/9/2012	2:40:39 PM	BCl3 valve closed
11/9/2012	2:40:39 PM	PH3 valve closed
11/9/2012	2:40:39 PM	SiCl4 pre valve closed
11/9/2012	2:40:39 PM	SiCl4 post valve closed
11/9/2012	2:40:39 PM	Bypass valve closed
11/9/2012	2:40:39 PM	Bubbler valve closed
11/9/2012	2:40:39 PM	Main Vac valve opened
11/9/2012	2:40:39 PM	Helium MFC set to  0.000000
11/9/2012	2:40:39 PM	H2 MFC set to  0.000000
11/9/2012	2:40:39 PM	BCl3 MFC set to  0.000000
11/9/2012	2:40:39 PM	PH3 MFC set to  0.000000
11/9/2012	2:40:39 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:40:39 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:40:39 PM	Tube furnace set to 150
11/9/2012	2:41:09 PM	H2 valve closed
11/9/2012	2:41:09 PM	BCl3 valve closed
11/9/2012	2:41:09 PM	PH3 valve closed
11/9/2012	2:41:09 PM	SiCl4 pre valve closed
11/9/2012	2:41:09 PM	SiCl4 post valve closed
11/9/2012	2:41:09 PM	Bypass valve closed
11/9/2012	2:41:09 PM	Bubbler valve closed
11/9/2012	2:41:09 PM	Helium valve opened
11/9/2012	2:41:09 PM	Main Vac valve opened
11/9/2012	2:41:09 PM	Helium MFC set to  20.000000
11/9/2012	2:41:09 PM	H2 MFC set to  0.000000
11/9/2012	2:41:09 PM	BCl3 MFC set to  0.000000
11/9/2012	2:41:09 PM	PH3 MFC set to  0.000000
11/9/2012	2:41:09 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:41:09 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:41:09 PM	Tube furnace set to 150
11/9/2012	2:41:39 PM	Helium valve closed
11/9/2012	2:41:39 PM	H2 valve closed
11/9/2012	2:41:39 PM	BCl3 valve closed
11/9/2012	2:41:39 PM	PH3 valve closed
11/9/2012	2:41:39 PM	SiCl4 pre valve closed
11/9/2012	2:41:39 PM	SiCl4 post valve closed
11/9/2012	2:41:39 PM	Bypass valve closed
11/9/2012	2:41:39 PM	Bubbler valve closed
11/9/2012	2:41:39 PM	Main Vac valve opened
11/9/2012	2:41:39 PM	Helium MFC set to  0.000000
11/9/2012	2:41:39 PM	H2 MFC set to  0.000000
11/9/2012	2:41:39 PM	BCl3 MFC set to  0.000000
11/9/2012	2:41:39 PM	PH3 MFC set to  0.000000
11/9/2012	2:41:39 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:41:39 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:41:39 PM	Tube furnace set to 150
11/9/2012	2:42:09 PM	H2 valve closed
11/9/2012	2:42:09 PM	BCl3 valve closed
11/9/2012	2:42:09 PM	PH3 valve closed
11/9/2012	2:42:09 PM	SiCl4 pre valve closed
11/9/2012	2:42:09 PM	SiCl4 post valve closed
11/9/2012	2:42:09 PM	Bypass valve closed
11/9/2012	2:42:09 PM	Bubbler valve closed
11/9/2012	2:42:09 PM	Helium valve opened
11/9/2012	2:42:09 PM	Main Vac valve opened
11/9/2012	2:42:09 PM	Helium MFC set to  20.000000
11/9/2012	2:42:09 PM	H2 MFC set to  0.000000
11/9/2012	2:42:09 PM	BCl3 MFC set to  0.000000
11/9/2012	2:42:09 PM	PH3 MFC set to  0.000000
11/9/2012	2:42:09 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:42:09 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:42:10 PM	Tube furnace set to 150
11/9/2012	2:42:40 PM	Helium valve closed
11/9/2012	2:42:40 PM	H2 valve closed
11/9/2012	2:42:40 PM	BCl3 valve closed
11/9/2012	2:42:40 PM	PH3 valve closed
11/9/2012	2:42:40 PM	SiCl4 pre valve closed
11/9/2012	2:42:40 PM	SiCl4 post valve closed
11/9/2012	2:42:40 PM	Bypass valve closed
11/9/2012	2:42:40 PM	Bubbler valve closed
11/9/2012	2:42:40 PM	Main Vac valve opened
11/9/2012	2:42:40 PM	Helium MFC set to  0.000000
11/9/2012	2:42:40 PM	H2 MFC set to  0.000000
11/9/2012	2:42:40 PM	BCl3 MFC set to  0.000000
11/9/2012	2:42:40 PM	PH3 MFC set to  0.000000
11/9/2012	2:42:40 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:42:40 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:42:40 PM	Tube furnace set to 150
11/9/2012	2:43:10 PM	H2 valve closed
11/9/2012	2:43:10 PM	BCl3 valve closed
11/9/2012	2:43:10 PM	PH3 valve closed
11/9/2012	2:43:10 PM	SiCl4 pre valve closed
11/9/2012	2:43:10 PM	SiCl4 post valve closed
11/9/2012	2:43:10 PM	Bypass valve closed
11/9/2012	2:43:10 PM	Bubbler valve closed
11/9/2012	2:43:10 PM	Helium valve opened
11/9/2012	2:43:10 PM	Main Vac valve opened
11/9/2012	2:43:10 PM	Helium MFC set to  20.000000
11/9/2012	2:43:10 PM	H2 MFC set to  0.000000
11/9/2012	2:43:10 PM	BCl3 MFC set to  0.000000
11/9/2012	2:43:10 PM	PH3 MFC set to  0.000000
11/9/2012	2:43:10 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:43:10 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:43:10 PM	Tube furnace set to 150
11/9/2012	2:43:40 PM	Helium valve closed
11/9/2012	2:43:40 PM	H2 valve closed
11/9/2012	2:43:40 PM	BCl3 valve closed
11/9/2012	2:43:40 PM	PH3 valve closed
11/9/2012	2:43:40 PM	SiCl4 pre valve closed
11/9/2012	2:43:40 PM	SiCl4 post valve closed
11/9/2012	2:43:40 PM	Bypass valve closed
11/9/2012	2:43:40 PM	Bubbler valve closed
11/9/2012	2:43:40 PM	Main Vac valve opened
11/9/2012	2:43:40 PM	Helium MFC set to  0.000000
11/9/2012	2:43:40 PM	H2 MFC set to  0.000000
11/9/2012	2:43:40 PM	BCl3 MFC set to  0.000000
11/9/2012	2:43:40 PM	PH3 MFC set to  0.000000
11/9/2012	2:43:40 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:43:40 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:43:40 PM	Tube furnace set to 150
11/9/2012	2:44:10 PM	H2 valve closed
11/9/2012	2:44:10 PM	BCl3 valve closed
11/9/2012	2:44:10 PM	PH3 valve closed
11/9/2012	2:44:10 PM	SiCl4 pre valve closed
11/9/2012	2:44:10 PM	SiCl4 post valve closed
11/9/2012	2:44:10 PM	Bypass valve closed
11/9/2012	2:44:10 PM	Bubbler valve closed
11/9/2012	2:44:10 PM	Helium valve opened
11/9/2012	2:44:10 PM	Main Vac valve opened
11/9/2012	2:44:10 PM	Helium MFC set to  20.000000
11/9/2012	2:44:10 PM	H2 MFC set to  0.000000
11/9/2012	2:44:10 PM	BCl3 MFC set to  0.000000
11/9/2012	2:44:10 PM	PH3 MFC set to  0.000000
11/9/2012	2:44:10 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:44:10 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:44:11 PM	Tube furnace set to 150
11/9/2012	2:44:41 PM	Helium valve closed
11/9/2012	2:44:41 PM	H2 valve closed
11/9/2012	2:44:41 PM	BCl3 valve closed
11/9/2012	2:44:41 PM	PH3 valve closed
11/9/2012	2:44:41 PM	SiCl4 pre valve closed
11/9/2012	2:44:41 PM	SiCl4 post valve closed
11/9/2012	2:44:41 PM	Bypass valve closed
11/9/2012	2:44:41 PM	Bubbler valve closed
11/9/2012	2:44:41 PM	Main Vac valve opened
11/9/2012	2:44:41 PM	Helium MFC set to  0.000000
11/9/2012	2:44:41 PM	H2 MFC set to  0.000000
11/9/2012	2:44:41 PM	BCl3 MFC set to  0.000000
11/9/2012	2:44:41 PM	PH3 MFC set to  0.000000
11/9/2012	2:44:41 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:44:41 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:44:41 PM	Tube furnace set to 150
11/9/2012	2:45:11 PM	H2 valve closed
11/9/2012	2:45:11 PM	BCl3 valve closed
11/9/2012	2:45:11 PM	PH3 valve closed
11/9/2012	2:45:11 PM	SiCl4 pre valve closed
11/9/2012	2:45:11 PM	SiCl4 post valve closed
11/9/2012	2:45:11 PM	Bypass valve closed
11/9/2012	2:45:11 PM	Bubbler valve closed
11/9/2012	2:45:11 PM	Helium valve opened
11/9/2012	2:45:11 PM	Main Vac valve opened
11/9/2012	2:45:11 PM	Helium MFC set to  20.000000
11/9/2012	2:45:11 PM	H2 MFC set to  0.000000
11/9/2012	2:45:11 PM	BCl3 MFC set to  0.000000
11/9/2012	2:45:11 PM	PH3 MFC set to  0.000000
11/9/2012	2:45:11 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:45:11 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:45:11 PM	Tube furnace set to 150
11/9/2012	2:45:41 PM	Helium valve closed
11/9/2012	2:45:41 PM	H2 valve closed
11/9/2012	2:45:41 PM	BCl3 valve closed
11/9/2012	2:45:41 PM	PH3 valve closed
11/9/2012	2:45:41 PM	SiCl4 pre valve closed
11/9/2012	2:45:41 PM	SiCl4 post valve closed
11/9/2012	2:45:41 PM	Bypass valve closed
11/9/2012	2:45:41 PM	Bubbler valve closed
11/9/2012	2:45:41 PM	Main Vac valve opened
11/9/2012	2:45:41 PM	Helium MFC set to  0.000000
11/9/2012	2:45:41 PM	H2 MFC set to  0.000000
11/9/2012	2:45:41 PM	BCl3 MFC set to  0.000000
11/9/2012	2:45:41 PM	PH3 MFC set to  0.000000
11/9/2012	2:45:41 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:45:41 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:45:41 PM	Tube furnace set to 150
11/9/2012	2:46:11 PM	H2 valve closed
11/9/2012	2:46:11 PM	BCl3 valve closed
11/9/2012	2:46:11 PM	PH3 valve closed
11/9/2012	2:46:11 PM	SiCl4 pre valve closed
11/9/2012	2:46:11 PM	SiCl4 post valve closed
11/9/2012	2:46:11 PM	Bypass valve closed
11/9/2012	2:46:11 PM	Bubbler valve closed
11/9/2012	2:46:11 PM	Helium valve opened
11/9/2012	2:46:11 PM	Main Vac valve opened
11/9/2012	2:46:11 PM	Helium MFC set to  20.000000
11/9/2012	2:46:11 PM	H2 MFC set to  0.000000
11/9/2012	2:46:11 PM	BCl3 MFC set to  0.000000
11/9/2012	2:46:11 PM	PH3 MFC set to  0.000000
11/9/2012	2:46:11 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:46:11 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:46:12 PM	Tube furnace set to 150
11/9/2012	2:46:42 PM	Helium valve closed
11/9/2012	2:46:42 PM	H2 valve closed
11/9/2012	2:46:42 PM	BCl3 valve closed
11/9/2012	2:46:42 PM	PH3 valve closed
11/9/2012	2:46:42 PM	SiCl4 pre valve closed
11/9/2012	2:46:42 PM	SiCl4 post valve closed
11/9/2012	2:46:42 PM	Bypass valve closed
11/9/2012	2:46:42 PM	Bubbler valve closed
11/9/2012	2:46:42 PM	Main Vac valve opened
11/9/2012	2:46:42 PM	Helium MFC set to  0.000000
11/9/2012	2:46:42 PM	H2 MFC set to  0.000000
11/9/2012	2:46:42 PM	BCl3 MFC set to  0.000000
11/9/2012	2:46:42 PM	PH3 MFC set to  0.000000
11/9/2012	2:46:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:46:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:46:42 PM	Tube furnace set to 150
11/9/2012	2:47:12 PM	H2 valve closed
11/9/2012	2:47:12 PM	BCl3 valve closed
11/9/2012	2:47:12 PM	PH3 valve closed
11/9/2012	2:47:12 PM	SiCl4 pre valve closed
11/9/2012	2:47:12 PM	SiCl4 post valve closed
11/9/2012	2:47:12 PM	Bypass valve closed
11/9/2012	2:47:12 PM	Bubbler valve closed
11/9/2012	2:47:12 PM	Helium valve opened
11/9/2012	2:47:12 PM	Main Vac valve opened
11/9/2012	2:47:12 PM	Helium MFC set to  20.000000
11/9/2012	2:47:12 PM	H2 MFC set to  0.000000
11/9/2012	2:47:12 PM	BCl3 MFC set to  0.000000
11/9/2012	2:47:12 PM	PH3 MFC set to  0.000000
11/9/2012	2:47:12 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:47:12 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:47:12 PM	Tube furnace set to 150
11/9/2012	2:47:42 PM	Helium valve closed
11/9/2012	2:47:42 PM	H2 valve closed
11/9/2012	2:47:42 PM	BCl3 valve closed
11/9/2012	2:47:42 PM	PH3 valve closed
11/9/2012	2:47:42 PM	SiCl4 pre valve closed
11/9/2012	2:47:42 PM	SiCl4 post valve closed
11/9/2012	2:47:42 PM	Bypass valve closed
11/9/2012	2:47:42 PM	Bubbler valve closed
11/9/2012	2:47:42 PM	Main Vac valve opened
11/9/2012	2:47:42 PM	Helium MFC set to  0.000000
11/9/2012	2:47:42 PM	H2 MFC set to  0.000000
11/9/2012	2:47:42 PM	BCl3 MFC set to  0.000000
11/9/2012	2:47:42 PM	PH3 MFC set to  0.000000
11/9/2012	2:47:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:47:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:47:42 PM	Tube furnace set to 150
11/9/2012	2:47:43 PM	Run finished at 2:47 PM
11/9/2012	2:57:12 PM	Recipe started at 2:57 PM
11/9/2012	2:57:12 PM	Helium valve closed
11/9/2012	2:57:12 PM	H2 valve closed
11/9/2012	2:57:12 PM	BCl3 valve closed
11/9/2012	2:57:12 PM	PH3 valve closed
11/9/2012	2:57:12 PM	SiCl4 pre valve closed
11/9/2012	2:57:12 PM	SiCl4 post valve closed
11/9/2012	2:57:12 PM	Main Vac valve closed
11/9/2012	2:57:12 PM	Bypass valve closed
11/9/2012	2:57:12 PM	Bubbler valve closed
11/9/2012	2:57:12 PM	Helium MFC set to  0.000000
11/9/2012	2:57:12 PM	H2 MFC set to  0.000000
11/9/2012	2:57:12 PM	BCl3 MFC set to  0.000000
11/9/2012	2:57:12 PM	PH3 MFC set to  0.000000
11/9/2012	2:57:12 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:57:12 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:57:12 PM	Tube furnace set to 0
11/9/2012	2:57:15 PM	Helium valve closed
11/9/2012	2:57:15 PM	BCl3 valve closed
11/9/2012	2:57:15 PM	PH3 valve closed
11/9/2012	2:57:15 PM	SiCl4 pre valve closed
11/9/2012	2:57:15 PM	SiCl4 post valve closed
11/9/2012	2:57:15 PM	Main Vac valve closed
11/9/2012	2:57:15 PM	Bypass valve closed
11/9/2012	2:57:15 PM	Bubbler valve closed
11/9/2012	2:57:15 PM	H2 valve opened
11/9/2012	2:57:15 PM	Helium MFC set to  0.000000
11/9/2012	2:57:15 PM	H2 MFC set to  500.000000
11/9/2012	2:57:15 PM	BCl3 MFC set to  0.000000
11/9/2012	2:57:15 PM	PH3 MFC set to  0.000000
11/9/2012	2:57:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:57:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:57:15 PM	Tube furnace set to 0
11/9/2012	2:58:28 PM	Helium valve closed
11/9/2012	2:58:28 PM	BCl3 valve closed
11/9/2012	2:58:28 PM	PH3 valve closed
11/9/2012	2:58:28 PM	SiCl4 pre valve closed
11/9/2012	2:58:28 PM	SiCl4 post valve closed
11/9/2012	2:58:28 PM	Main Vac valve closed
11/9/2012	2:58:28 PM	Bypass valve closed
11/9/2012	2:58:28 PM	H2 valve opened
11/9/2012	2:58:28 PM	Bubbler valve opened
11/9/2012	2:58:28 PM	Helium MFC set to  0.000000
11/9/2012	2:58:28 PM	H2 MFC set to  500.000000
11/9/2012	2:58:28 PM	BCl3 MFC set to  0.000000
11/9/2012	2:58:28 PM	PH3 MFC set to  0.000000
11/9/2012	2:58:28 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:58:28 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:58:28 PM	Tube furnace set to 0
11/9/2012	2:58:29 PM	Helium valve closed
11/9/2012	2:58:29 PM	BCl3 valve closed
11/9/2012	2:58:29 PM	PH3 valve closed
11/9/2012	2:58:29 PM	SiCl4 pre valve closed
11/9/2012	2:58:29 PM	SiCl4 post valve closed
11/9/2012	2:58:29 PM	Main Vac valve closed
11/9/2012	2:58:29 PM	Bypass valve closed
11/9/2012	2:58:29 PM	H2 valve opened
11/9/2012	2:58:29 PM	Bubbler valve opened
11/9/2012	2:58:29 PM	Helium MFC set to  0.000000
11/9/2012	2:58:29 PM	H2 MFC set to  500.000000
11/9/2012	2:58:29 PM	BCl3 MFC set to  0.000000
11/9/2012	2:58:29 PM	PH3 MFC set to  0.000000
11/9/2012	2:58:29 PM	SiCl4 MFC set to  0.000000
11/9/2012	2:58:29 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	2:58:29 PM	Tube furnace set to 1000
11/9/2012	3:18:29 PM	Helium valve closed
11/9/2012	3:18:29 PM	PH3 valve closed
11/9/2012	3:18:29 PM	Main Vac valve closed
11/9/2012	3:18:29 PM	Bypass valve closed
11/9/2012	3:18:29 PM	H2 valve opened
11/9/2012	3:18:29 PM	BCl3 valve opened
11/9/2012	3:18:29 PM	SiCl4 pre valve opened
11/9/2012	3:18:29 PM	SiCl4 post valve opened
11/9/2012	3:18:29 PM	Bubbler valve opened
11/9/2012	3:18:29 PM	Helium MFC set to  0.000000
11/9/2012	3:18:29 PM	H2 MFC set to  450.000000
11/9/2012	3:18:29 PM	BCl3 MFC set to  1.500000
11/9/2012	3:18:29 PM	PH3 MFC set to  0.000000
11/9/2012	3:18:29 PM	SiCl4 MFC set to  50.000000
11/9/2012	3:18:29 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:18:29 PM	Tube furnace set to 1000
11/9/2012	3:33:29 PM	Helium valve closed
11/9/2012	3:33:29 PM	BCl3 valve closed
11/9/2012	3:33:29 PM	Main Vac valve closed
11/9/2012	3:33:29 PM	Bypass valve closed
11/9/2012	3:33:29 PM	H2 valve opened
11/9/2012	3:33:29 PM	PH3 valve opened
11/9/2012	3:33:29 PM	SiCl4 pre valve opened
11/9/2012	3:33:29 PM	SiCl4 post valve opened
11/9/2012	3:33:29 PM	Bubbler valve opened
11/9/2012	3:33:29 PM	Helium MFC set to  0.000000
11/9/2012	3:33:29 PM	H2 MFC set to  450.000000
11/9/2012	3:33:29 PM	BCl3 MFC set to  0.000000
11/9/2012	3:33:29 PM	PH3 MFC set to  20.000000
11/9/2012	3:33:29 PM	SiCl4 MFC set to  50.000000
11/9/2012	3:33:29 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:33:30 PM	Tube furnace set to 1000
11/9/2012	3:38:30 PM	Helium valve closed
11/9/2012	3:38:30 PM	BCl3 valve closed
11/9/2012	3:38:30 PM	PH3 valve closed
11/9/2012	3:38:30 PM	SiCl4 pre valve closed
11/9/2012	3:38:30 PM	SiCl4 post valve closed
11/9/2012	3:38:30 PM	Main Vac valve closed
11/9/2012	3:38:30 PM	Bypass valve closed
11/9/2012	3:38:30 PM	H2 valve opened
11/9/2012	3:38:30 PM	Bubbler valve opened
11/9/2012	3:38:30 PM	Helium MFC set to  0.000000
11/9/2012	3:38:30 PM	H2 MFC set to  500.000000
11/9/2012	3:38:30 PM	BCl3 MFC set to  0.000000
11/9/2012	3:38:30 PM	PH3 MFC set to  0.000000
11/9/2012	3:38:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:38:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:38:30 PM	Tube furnace set to 950
11/9/2012	3:41:30 PM	Helium valve closed
11/9/2012	3:41:30 PM	BCl3 valve closed
11/9/2012	3:41:30 PM	PH3 valve closed
11/9/2012	3:41:30 PM	SiCl4 pre valve closed
11/9/2012	3:41:30 PM	SiCl4 post valve closed
11/9/2012	3:41:30 PM	Main Vac valve closed
11/9/2012	3:41:30 PM	Bypass valve closed
11/9/2012	3:41:30 PM	H2 valve opened
11/9/2012	3:41:30 PM	Bubbler valve opened
11/9/2012	3:41:30 PM	Helium MFC set to  0.000000
11/9/2012	3:41:30 PM	H2 MFC set to  500.000000
11/9/2012	3:41:30 PM	BCl3 MFC set to  0.000000
11/9/2012	3:41:30 PM	PH3 MFC set to  0.000000
11/9/2012	3:41:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:41:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:41:30 PM	Tube furnace set to 900
11/9/2012	3:44:30 PM	Helium valve closed
11/9/2012	3:44:30 PM	BCl3 valve closed
11/9/2012	3:44:30 PM	PH3 valve closed
11/9/2012	3:44:30 PM	SiCl4 pre valve closed
11/9/2012	3:44:30 PM	SiCl4 post valve closed
11/9/2012	3:44:30 PM	Main Vac valve closed
11/9/2012	3:44:30 PM	Bypass valve closed
11/9/2012	3:44:30 PM	H2 valve opened
11/9/2012	3:44:30 PM	Bubbler valve opened
11/9/2012	3:44:30 PM	Helium MFC set to  0.000000
11/9/2012	3:44:30 PM	H2 MFC set to  500.000000
11/9/2012	3:44:30 PM	BCl3 MFC set to  0.000000
11/9/2012	3:44:30 PM	PH3 MFC set to  0.000000
11/9/2012	3:44:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:44:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:44:30 PM	Tube furnace set to 850
11/9/2012	3:47:30 PM	Helium valve closed
11/9/2012	3:47:30 PM	BCl3 valve closed
11/9/2012	3:47:30 PM	PH3 valve closed
11/9/2012	3:47:30 PM	SiCl4 pre valve closed
11/9/2012	3:47:30 PM	SiCl4 post valve closed
11/9/2012	3:47:30 PM	Main Vac valve closed
11/9/2012	3:47:30 PM	Bypass valve closed
11/9/2012	3:47:30 PM	H2 valve opened
11/9/2012	3:47:30 PM	Bubbler valve opened
11/9/2012	3:47:30 PM	Helium MFC set to  0.000000
11/9/2012	3:47:30 PM	H2 MFC set to  500.000000
11/9/2012	3:47:30 PM	BCl3 MFC set to  0.000000
11/9/2012	3:47:30 PM	PH3 MFC set to  0.000000
11/9/2012	3:47:30 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:47:30 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:47:31 PM	Tube furnace set to 800
11/9/2012	3:50:31 PM	Helium valve closed
11/9/2012	3:50:31 PM	BCl3 valve closed
11/9/2012	3:50:31 PM	PH3 valve closed
11/9/2012	3:50:31 PM	SiCl4 pre valve closed
11/9/2012	3:50:31 PM	SiCl4 post valve closed
11/9/2012	3:50:31 PM	Main Vac valve closed
11/9/2012	3:50:31 PM	Bypass valve closed
11/9/2012	3:50:31 PM	H2 valve opened
11/9/2012	3:50:31 PM	Bubbler valve opened
11/9/2012	3:50:31 PM	Helium MFC set to  0.000000
11/9/2012	3:50:31 PM	H2 MFC set to  500.000000
11/9/2012	3:50:31 PM	BCl3 MFC set to  0.000000
11/9/2012	3:50:31 PM	PH3 MFC set to  0.000000
11/9/2012	3:50:31 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:50:31 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:50:31 PM	Tube furnace set to 750
11/9/2012	3:53:31 PM	H2 valve closed
11/9/2012	3:53:31 PM	BCl3 valve closed
11/9/2012	3:53:31 PM	PH3 valve closed
11/9/2012	3:53:31 PM	SiCl4 pre valve closed
11/9/2012	3:53:31 PM	SiCl4 post valve closed
11/9/2012	3:53:31 PM	Main Vac valve closed
11/9/2012	3:53:31 PM	Bypass valve closed
11/9/2012	3:53:31 PM	Helium valve opened
11/9/2012	3:53:31 PM	Bubbler valve opened
11/9/2012	3:53:31 PM	Helium MFC set to  500.000000
11/9/2012	3:53:31 PM	H2 MFC set to  0.000000
11/9/2012	3:53:31 PM	BCl3 MFC set to  0.000000
11/9/2012	3:53:31 PM	PH3 MFC set to  0.000000
11/9/2012	3:53:31 PM	SiCl4 MFC set to  0.000000
11/9/2012	3:53:31 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	3:53:31 PM	Tube furnace set to 0
11/9/2012	4:13:31 PM	Helium valve closed
11/9/2012	4:13:31 PM	H2 valve closed
11/9/2012	4:13:31 PM	BCl3 valve closed
11/9/2012	4:13:31 PM	PH3 valve closed
11/9/2012	4:13:31 PM	SiCl4 pre valve closed
11/9/2012	4:13:31 PM	SiCl4 post valve closed
11/9/2012	4:13:31 PM	Main Vac valve closed
11/9/2012	4:13:31 PM	Bypass valve closed
11/9/2012	4:13:31 PM	Bubbler valve closed
11/9/2012	4:13:31 PM	Helium MFC set to  0.000000
11/9/2012	4:13:31 PM	H2 MFC set to  0.000000
11/9/2012	4:13:31 PM	BCl3 MFC set to  0.000000
11/9/2012	4:13:31 PM	PH3 MFC set to  0.000000
11/9/2012	4:13:31 PM	SiCl4 MFC set to  0.000000
11/9/2012	4:13:31 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	4:13:31 PM	Tube furnace set to 0
11/9/2012	4:13:32 PM	Run finished at 4:13 PM
11/9/2012	5:01:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	5:01:42 PM	Recipe started at 5:01 PM
11/9/2012	5:01:42 PM	Helium valve closed
11/9/2012	5:01:42 PM	H2 valve closed
11/9/2012	5:01:42 PM	BCl3 valve closed
11/9/2012	5:01:42 PM	PH3 valve closed
11/9/2012	5:01:42 PM	SiCl4 pre valve closed
11/9/2012	5:01:42 PM	SiCl4 post valve closed
11/9/2012	5:01:42 PM	Main Vac valve closed
11/9/2012	5:01:42 PM	Bypass valve closed
11/9/2012	5:01:42 PM	Bubbler valve closed
11/9/2012	5:01:42 PM	Helium MFC set to  0.000000
11/9/2012	5:01:42 PM	H2 MFC set to  0.000000
11/9/2012	5:01:42 PM	BCl3 MFC set to  0.000000
11/9/2012	5:01:42 PM	PH3 MFC set to  0.000000
11/9/2012	5:01:42 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:01:42 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:01:43 PM	Tube furnace set to 0
11/9/2012	5:01:46 PM	H2 valve closed
11/9/2012	5:01:46 PM	BCl3 valve closed
11/9/2012	5:01:46 PM	PH3 valve closed
11/9/2012	5:01:46 PM	SiCl4 pre valve closed
11/9/2012	5:01:46 PM	SiCl4 post valve closed
11/9/2012	5:01:46 PM	Main Vac valve closed
11/9/2012	5:01:46 PM	Bypass valve closed
11/9/2012	5:01:46 PM	Bubbler valve closed
11/9/2012	5:01:46 PM	Helium valve opened
11/9/2012	5:01:46 PM	Helium MFC set to  500.000000
11/9/2012	5:01:46 PM	H2 MFC set to  0.000000
11/9/2012	5:01:46 PM	BCl3 MFC set to  0.000000
11/9/2012	5:01:46 PM	PH3 MFC set to  0.000000
11/9/2012	5:01:46 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:01:46 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:01:46 PM	Tube furnace set to 0
11/9/2012	5:01:48 PM	Helium valve closed
11/9/2012	5:01:48 PM	H2 valve closed
11/9/2012	5:01:48 PM	BCl3 valve closed
11/9/2012	5:01:48 PM	PH3 valve closed
11/9/2012	5:01:48 PM	SiCl4 pre valve closed
11/9/2012	5:01:48 PM	SiCl4 post valve closed
11/9/2012	5:01:48 PM	Main Vac valve closed
11/9/2012	5:01:48 PM	Bypass valve closed
11/9/2012	5:01:48 PM	Bubbler valve closed
11/9/2012	5:01:48 PM	Helium MFC set to  0.000000
11/9/2012	5:01:48 PM	H2 MFC set to  0.000000
11/9/2012	5:01:48 PM	BCl3 MFC set to  0.000000
11/9/2012	5:01:48 PM	PH3 MFC set to  0.000000
11/9/2012	5:01:48 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:01:48 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:01:48 PM	Tube furnace set to 0
11/9/2012	5:01:49 PM	Run finished at 5:01 PM
11/9/2012	5:01:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	5:16:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	5:16:56 PM	Recipe started at 5:16 PM
11/9/2012	5:16:56 PM	Helium valve closed
11/9/2012	5:16:56 PM	H2 valve closed
11/9/2012	5:16:56 PM	BCl3 valve closed
11/9/2012	5:16:56 PM	PH3 valve closed
11/9/2012	5:16:56 PM	SiCl4 pre valve closed
11/9/2012	5:16:56 PM	SiCl4 post valve closed
11/9/2012	5:16:56 PM	Main Vac valve closed
11/9/2012	5:16:56 PM	Bubbler valve closed
11/9/2012	5:16:56 PM	Bypass valve opened
11/9/2012	5:16:56 PM	Helium MFC set to  0.000000
11/9/2012	5:16:56 PM	H2 MFC set to  0.000000
11/9/2012	5:16:56 PM	BCl3 MFC set to  0.000000
11/9/2012	5:16:56 PM	PH3 MFC set to  0.000000
11/9/2012	5:16:56 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:16:56 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:16:56 PM	Tube furnace set to 0
11/9/2012	5:18:17 PM	Helium valve closed
11/9/2012	5:18:17 PM	H2 valve closed
11/9/2012	5:18:17 PM	BCl3 valve closed
11/9/2012	5:18:17 PM	PH3 valve closed
11/9/2012	5:18:17 PM	SiCl4 pre valve closed
11/9/2012	5:18:17 PM	SiCl4 post valve closed
11/9/2012	5:18:17 PM	Main Vac valve closed
11/9/2012	5:18:17 PM	Bubbler valve closed
11/9/2012	5:18:17 PM	Bypass valve opened
11/9/2012	5:18:17 PM	Helium MFC set to  0.000000
11/9/2012	5:18:17 PM	H2 MFC set to  0.000000
11/9/2012	5:18:17 PM	BCl3 MFC set to  0.000000
11/9/2012	5:18:17 PM	PH3 MFC set to  0.000000
11/9/2012	5:18:17 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:18:17 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:18:17 PM	Tube furnace set to 0
11/9/2012	5:19:17 PM	Helium valve closed
11/9/2012	5:19:17 PM	H2 valve closed
11/9/2012	5:19:17 PM	BCl3 valve closed
11/9/2012	5:19:17 PM	PH3 valve closed
11/9/2012	5:19:17 PM	SiCl4 pre valve closed
11/9/2012	5:19:17 PM	SiCl4 post valve closed
11/9/2012	5:19:17 PM	Bypass valve closed
11/9/2012	5:19:17 PM	Bubbler valve closed
11/9/2012	5:19:17 PM	Main Vac valve opened
11/9/2012	5:19:17 PM	Helium MFC set to  0.000000
11/9/2012	5:19:17 PM	H2 MFC set to  0.000000
11/9/2012	5:19:17 PM	BCl3 MFC set to  0.000000
11/9/2012	5:19:17 PM	PH3 MFC set to  0.000000
11/9/2012	5:19:17 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:19:17 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:19:17 PM	Tube furnace set to 0
11/9/2012	5:19:18 PM	Run finished at 5:19 PM
11/9/2012	5:19:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	5:20:03 PM	Recipe started at 5:19 PM
11/9/2012	5:20:03 PM	Helium valve closed
11/9/2012	5:20:03 PM	H2 valve closed
11/9/2012	5:20:03 PM	BCl3 valve closed
11/9/2012	5:20:03 PM	PH3 valve closed
11/9/2012	5:20:03 PM	SiCl4 pre valve closed
11/9/2012	5:20:03 PM	SiCl4 post valve closed
11/9/2012	5:20:03 PM	Bypass valve closed
11/9/2012	5:20:03 PM	Bubbler valve closed
11/9/2012	5:20:03 PM	Main Vac valve opened
11/9/2012	5:20:03 PM	Helium MFC set to  0.000000
11/9/2012	5:20:03 PM	H2 MFC set to  0.000000
11/9/2012	5:20:03 PM	BCl3 MFC set to  0.000000
11/9/2012	5:20:03 PM	PH3 MFC set to  0.000000
11/9/2012	5:20:03 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:20:03 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:20:03 PM	Tube furnace set to 150
11/9/2012	5:20:33 PM	H2 valve closed
11/9/2012	5:20:33 PM	BCl3 valve closed
11/9/2012	5:20:33 PM	PH3 valve closed
11/9/2012	5:20:33 PM	SiCl4 pre valve closed
11/9/2012	5:20:33 PM	SiCl4 post valve closed
11/9/2012	5:20:33 PM	Bypass valve closed
11/9/2012	5:20:33 PM	Bubbler valve closed
11/9/2012	5:20:33 PM	Helium valve opened
11/9/2012	5:20:33 PM	Main Vac valve opened
11/9/2012	5:20:33 PM	Helium MFC set to  20.000000
11/9/2012	5:20:33 PM	H2 MFC set to  0.000000
11/9/2012	5:20:33 PM	BCl3 MFC set to  0.000000
11/9/2012	5:20:33 PM	PH3 MFC set to  0.000000
11/9/2012	5:20:33 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:20:33 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:20:34 PM	Tube furnace set to 150
11/9/2012	5:21:04 PM	Helium valve closed
11/9/2012	5:21:04 PM	H2 valve closed
11/9/2012	5:21:04 PM	BCl3 valve closed
11/9/2012	5:21:04 PM	PH3 valve closed
11/9/2012	5:21:04 PM	SiCl4 pre valve closed
11/9/2012	5:21:04 PM	SiCl4 post valve closed
11/9/2012	5:21:04 PM	Bypass valve closed
11/9/2012	5:21:04 PM	Bubbler valve closed
11/9/2012	5:21:04 PM	Main Vac valve opened
11/9/2012	5:21:04 PM	Helium MFC set to  0.000000
11/9/2012	5:21:04 PM	H2 MFC set to  0.000000
11/9/2012	5:21:04 PM	BCl3 MFC set to  0.000000
11/9/2012	5:21:04 PM	PH3 MFC set to  0.000000
11/9/2012	5:21:04 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:21:04 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:21:04 PM	Tube furnace set to 150
11/9/2012	5:21:34 PM	H2 valve closed
11/9/2012	5:21:34 PM	BCl3 valve closed
11/9/2012	5:21:34 PM	PH3 valve closed
11/9/2012	5:21:34 PM	SiCl4 pre valve closed
11/9/2012	5:21:34 PM	SiCl4 post valve closed
11/9/2012	5:21:34 PM	Bypass valve closed
11/9/2012	5:21:34 PM	Bubbler valve closed
11/9/2012	5:21:34 PM	Helium valve opened
11/9/2012	5:21:34 PM	Main Vac valve opened
11/9/2012	5:21:34 PM	Helium MFC set to  20.000000
11/9/2012	5:21:34 PM	H2 MFC set to  0.000000
11/9/2012	5:21:34 PM	BCl3 MFC set to  0.000000
11/9/2012	5:21:34 PM	PH3 MFC set to  0.000000
11/9/2012	5:21:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:21:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:21:34 PM	Tube furnace set to 150
11/9/2012	5:21:38 PM	Run aborted at 5:21 PM
11/9/2012	5:21:38 PM	Helium valve closed
11/9/2012	5:21:38 PM	H2 valve closed
11/9/2012	5:21:38 PM	BCl3 valve closed
11/9/2012	5:21:38 PM	PH3 valve closed
11/9/2012	5:21:38 PM	SiCl4 pre valve closed
11/9/2012	5:21:38 PM	SiCl4 post valve closed
11/9/2012	5:21:38 PM	Bypass valve closed
11/9/2012	5:21:38 PM	Main Vac valve closed
11/9/2012	5:21:38 PM	Bubbler valve closed
11/9/2012	5:21:38 PM	Helium MFC set to  0.000000
11/9/2012	5:21:38 PM	H2 MFC set to  0.000000
11/9/2012	5:21:38 PM	BCl3 MFC set to  0.000000
11/9/2012	5:21:38 PM	PH3 MFC set to  0.000000
11/9/2012	5:21:38 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:21:38 PM	Tube furnace set to 0
11/9/2012	5:21:40 PM	Main Vac valve opened
11/9/2012	5:23:34 PM	Recipe started at 5:23 PM
11/9/2012	5:23:34 PM	Helium valve closed
11/9/2012	5:23:34 PM	H2 valve closed
11/9/2012	5:23:34 PM	BCl3 valve closed
11/9/2012	5:23:34 PM	PH3 valve closed
11/9/2012	5:23:34 PM	SiCl4 pre valve closed
11/9/2012	5:23:34 PM	SiCl4 post valve closed
11/9/2012	5:23:34 PM	Bypass valve closed
11/9/2012	5:23:34 PM	Bubbler valve closed
11/9/2012	5:23:34 PM	Main Vac valve opened
11/9/2012	5:23:34 PM	Helium MFC set to  0.000000
11/9/2012	5:23:34 PM	H2 MFC set to  0.000000
11/9/2012	5:23:34 PM	BCl3 MFC set to  0.000000
11/9/2012	5:23:34 PM	PH3 MFC set to  0.000000
11/9/2012	5:23:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:23:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:23:34 PM	Tube furnace set to 150
11/9/2012	5:24:04 PM	H2 valve closed
11/9/2012	5:24:04 PM	BCl3 valve closed
11/9/2012	5:24:04 PM	PH3 valve closed
11/9/2012	5:24:04 PM	SiCl4 pre valve closed
11/9/2012	5:24:04 PM	SiCl4 post valve closed
11/9/2012	5:24:04 PM	Bypass valve closed
11/9/2012	5:24:04 PM	Bubbler valve closed
11/9/2012	5:24:04 PM	Helium valve opened
11/9/2012	5:24:04 PM	Main Vac valve opened
11/9/2012	5:24:04 PM	Helium MFC set to  20.000000
11/9/2012	5:24:04 PM	H2 MFC set to  0.000000
11/9/2012	5:24:04 PM	BCl3 MFC set to  0.000000
11/9/2012	5:24:04 PM	PH3 MFC set to  0.000000
11/9/2012	5:24:04 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:24:04 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:24:05 PM	Tube furnace set to 150
11/9/2012	5:24:35 PM	Helium valve closed
11/9/2012	5:24:35 PM	H2 valve closed
11/9/2012	5:24:35 PM	BCl3 valve closed
11/9/2012	5:24:35 PM	PH3 valve closed
11/9/2012	5:24:35 PM	SiCl4 pre valve closed
11/9/2012	5:24:35 PM	SiCl4 post valve closed
11/9/2012	5:24:35 PM	Bypass valve closed
11/9/2012	5:24:35 PM	Bubbler valve closed
11/9/2012	5:24:35 PM	Main Vac valve opened
11/9/2012	5:24:35 PM	Helium MFC set to  0.000000
11/9/2012	5:24:35 PM	H2 MFC set to  0.000000
11/9/2012	5:24:35 PM	BCl3 MFC set to  0.000000
11/9/2012	5:24:35 PM	PH3 MFC set to  0.000000
11/9/2012	5:24:35 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:24:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:24:35 PM	Tube furnace set to 150
11/9/2012	5:25:05 PM	H2 valve closed
11/9/2012	5:25:05 PM	BCl3 valve closed
11/9/2012	5:25:05 PM	PH3 valve closed
11/9/2012	5:25:05 PM	SiCl4 pre valve closed
11/9/2012	5:25:05 PM	SiCl4 post valve closed
11/9/2012	5:25:05 PM	Bypass valve closed
11/9/2012	5:25:05 PM	Bubbler valve closed
11/9/2012	5:25:05 PM	Helium valve opened
11/9/2012	5:25:05 PM	Main Vac valve opened
11/9/2012	5:25:05 PM	Helium MFC set to  20.000000
11/9/2012	5:25:05 PM	H2 MFC set to  0.000000
11/9/2012	5:25:05 PM	BCl3 MFC set to  0.000000
11/9/2012	5:25:05 PM	PH3 MFC set to  0.000000
11/9/2012	5:25:05 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:25:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:25:05 PM	Tube furnace set to 150
11/9/2012	5:25:35 PM	Helium valve closed
11/9/2012	5:25:35 PM	H2 valve closed
11/9/2012	5:25:35 PM	BCl3 valve closed
11/9/2012	5:25:35 PM	PH3 valve closed
11/9/2012	5:25:35 PM	SiCl4 pre valve closed
11/9/2012	5:25:35 PM	SiCl4 post valve closed
11/9/2012	5:25:35 PM	Bypass valve closed
11/9/2012	5:25:35 PM	Bubbler valve closed
11/9/2012	5:25:35 PM	Main Vac valve opened
11/9/2012	5:25:35 PM	Helium MFC set to  0.000000
11/9/2012	5:25:35 PM	H2 MFC set to  0.000000
11/9/2012	5:25:35 PM	BCl3 MFC set to  0.000000
11/9/2012	5:25:35 PM	PH3 MFC set to  0.000000
11/9/2012	5:25:35 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:25:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:25:35 PM	Tube furnace set to 150
11/9/2012	5:26:05 PM	H2 valve closed
11/9/2012	5:26:05 PM	BCl3 valve closed
11/9/2012	5:26:05 PM	PH3 valve closed
11/9/2012	5:26:05 PM	SiCl4 pre valve closed
11/9/2012	5:26:05 PM	SiCl4 post valve closed
11/9/2012	5:26:05 PM	Bypass valve closed
11/9/2012	5:26:05 PM	Bubbler valve closed
11/9/2012	5:26:05 PM	Helium valve opened
11/9/2012	5:26:05 PM	Main Vac valve opened
11/9/2012	5:26:05 PM	Helium MFC set to  20.000000
11/9/2012	5:26:05 PM	H2 MFC set to  0.000000
11/9/2012	5:26:05 PM	BCl3 MFC set to  0.000000
11/9/2012	5:26:05 PM	PH3 MFC set to  0.000000
11/9/2012	5:26:05 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:26:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:26:06 PM	Tube furnace set to 150
11/9/2012	5:26:36 PM	Helium valve closed
11/9/2012	5:26:36 PM	H2 valve closed
11/9/2012	5:26:36 PM	BCl3 valve closed
11/9/2012	5:26:36 PM	PH3 valve closed
11/9/2012	5:26:36 PM	SiCl4 pre valve closed
11/9/2012	5:26:36 PM	SiCl4 post valve closed
11/9/2012	5:26:36 PM	Bypass valve closed
11/9/2012	5:26:36 PM	Bubbler valve closed
11/9/2012	5:26:36 PM	Main Vac valve opened
11/9/2012	5:26:36 PM	Helium MFC set to  0.000000
11/9/2012	5:26:36 PM	H2 MFC set to  0.000000
11/9/2012	5:26:36 PM	BCl3 MFC set to  0.000000
11/9/2012	5:26:36 PM	PH3 MFC set to  0.000000
11/9/2012	5:26:36 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:26:36 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:26:36 PM	Tube furnace set to 150
11/9/2012	5:27:06 PM	H2 valve closed
11/9/2012	5:27:06 PM	BCl3 valve closed
11/9/2012	5:27:06 PM	PH3 valve closed
11/9/2012	5:27:06 PM	SiCl4 pre valve closed
11/9/2012	5:27:06 PM	SiCl4 post valve closed
11/9/2012	5:27:06 PM	Bypass valve closed
11/9/2012	5:27:06 PM	Bubbler valve closed
11/9/2012	5:27:06 PM	Helium valve opened
11/9/2012	5:27:06 PM	Main Vac valve opened
11/9/2012	5:27:06 PM	Helium MFC set to  20.000000
11/9/2012	5:27:06 PM	H2 MFC set to  0.000000
11/9/2012	5:27:06 PM	BCl3 MFC set to  0.000000
11/9/2012	5:27:06 PM	PH3 MFC set to  0.000000
11/9/2012	5:27:06 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:27:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:27:06 PM	Tube furnace set to 150
11/9/2012	5:27:36 PM	Helium valve closed
11/9/2012	5:27:36 PM	H2 valve closed
11/9/2012	5:27:36 PM	BCl3 valve closed
11/9/2012	5:27:36 PM	PH3 valve closed
11/9/2012	5:27:36 PM	SiCl4 pre valve closed
11/9/2012	5:27:36 PM	SiCl4 post valve closed
11/9/2012	5:27:36 PM	Bypass valve closed
11/9/2012	5:27:36 PM	Bubbler valve closed
11/9/2012	5:27:36 PM	Main Vac valve opened
11/9/2012	5:27:36 PM	Helium MFC set to  0.000000
11/9/2012	5:27:36 PM	H2 MFC set to  0.000000
11/9/2012	5:27:36 PM	BCl3 MFC set to  0.000000
11/9/2012	5:27:36 PM	PH3 MFC set to  0.000000
11/9/2012	5:27:36 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:27:36 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:27:36 PM	Tube furnace set to 150
11/9/2012	5:28:06 PM	H2 valve closed
11/9/2012	5:28:06 PM	BCl3 valve closed
11/9/2012	5:28:06 PM	PH3 valve closed
11/9/2012	5:28:06 PM	SiCl4 pre valve closed
11/9/2012	5:28:06 PM	SiCl4 post valve closed
11/9/2012	5:28:06 PM	Bypass valve closed
11/9/2012	5:28:06 PM	Bubbler valve closed
11/9/2012	5:28:06 PM	Helium valve opened
11/9/2012	5:28:06 PM	Main Vac valve opened
11/9/2012	5:28:06 PM	Helium MFC set to  20.000000
11/9/2012	5:28:06 PM	H2 MFC set to  0.000000
11/9/2012	5:28:06 PM	BCl3 MFC set to  0.000000
11/9/2012	5:28:06 PM	PH3 MFC set to  0.000000
11/9/2012	5:28:06 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:28:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:28:06 PM	Tube furnace set to 150
11/9/2012	5:28:37 PM	Helium valve closed
11/9/2012	5:28:37 PM	H2 valve closed
11/9/2012	5:28:37 PM	BCl3 valve closed
11/9/2012	5:28:37 PM	PH3 valve closed
11/9/2012	5:28:37 PM	SiCl4 pre valve closed
11/9/2012	5:28:37 PM	SiCl4 post valve closed
11/9/2012	5:28:37 PM	Bypass valve closed
11/9/2012	5:28:37 PM	Bubbler valve closed
11/9/2012	5:28:37 PM	Main Vac valve opened
11/9/2012	5:28:37 PM	Helium MFC set to  0.000000
11/9/2012	5:28:37 PM	H2 MFC set to  0.000000
11/9/2012	5:28:37 PM	BCl3 MFC set to  0.000000
11/9/2012	5:28:37 PM	PH3 MFC set to  0.000000
11/9/2012	5:28:37 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:28:37 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:28:37 PM	Tube furnace set to 150
11/9/2012	5:29:07 PM	H2 valve closed
11/9/2012	5:29:07 PM	BCl3 valve closed
11/9/2012	5:29:07 PM	PH3 valve closed
11/9/2012	5:29:07 PM	SiCl4 pre valve closed
11/9/2012	5:29:07 PM	SiCl4 post valve closed
11/9/2012	5:29:07 PM	Bypass valve closed
11/9/2012	5:29:07 PM	Bubbler valve closed
11/9/2012	5:29:07 PM	Helium valve opened
11/9/2012	5:29:07 PM	Main Vac valve opened
11/9/2012	5:29:07 PM	Helium MFC set to  20.000000
11/9/2012	5:29:07 PM	H2 MFC set to  0.000000
11/9/2012	5:29:07 PM	BCl3 MFC set to  0.000000
11/9/2012	5:29:07 PM	PH3 MFC set to  0.000000
11/9/2012	5:29:07 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:29:07 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:29:07 PM	Tube furnace set to 150
11/9/2012	5:29:37 PM	Helium valve closed
11/9/2012	5:29:37 PM	H2 valve closed
11/9/2012	5:29:37 PM	BCl3 valve closed
11/9/2012	5:29:37 PM	PH3 valve closed
11/9/2012	5:29:37 PM	SiCl4 pre valve closed
11/9/2012	5:29:37 PM	SiCl4 post valve closed
11/9/2012	5:29:37 PM	Bypass valve closed
11/9/2012	5:29:37 PM	Bubbler valve closed
11/9/2012	5:29:37 PM	Main Vac valve opened
11/9/2012	5:29:37 PM	Helium MFC set to  0.000000
11/9/2012	5:29:37 PM	H2 MFC set to  0.000000
11/9/2012	5:29:37 PM	BCl3 MFC set to  0.000000
11/9/2012	5:29:37 PM	PH3 MFC set to  0.000000
11/9/2012	5:29:37 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:29:37 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:29:37 PM	Tube furnace set to 150
11/9/2012	5:30:07 PM	H2 valve closed
11/9/2012	5:30:07 PM	BCl3 valve closed
11/9/2012	5:30:07 PM	PH3 valve closed
11/9/2012	5:30:07 PM	SiCl4 pre valve closed
11/9/2012	5:30:07 PM	SiCl4 post valve closed
11/9/2012	5:30:07 PM	Bypass valve closed
11/9/2012	5:30:07 PM	Bubbler valve closed
11/9/2012	5:30:07 PM	Helium valve opened
11/9/2012	5:30:07 PM	Main Vac valve opened
11/9/2012	5:30:07 PM	Helium MFC set to  20.000000
11/9/2012	5:30:07 PM	H2 MFC set to  0.000000
11/9/2012	5:30:07 PM	BCl3 MFC set to  0.000000
11/9/2012	5:30:07 PM	PH3 MFC set to  0.000000
11/9/2012	5:30:07 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:30:07 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:30:07 PM	Tube furnace set to 150
11/9/2012	5:30:37 PM	Helium valve closed
11/9/2012	5:30:38 PM	H2 valve closed
11/9/2012	5:30:38 PM	BCl3 valve closed
11/9/2012	5:30:38 PM	PH3 valve closed
11/9/2012	5:30:38 PM	SiCl4 pre valve closed
11/9/2012	5:30:38 PM	SiCl4 post valve closed
11/9/2012	5:30:38 PM	Bypass valve closed
11/9/2012	5:30:38 PM	Bubbler valve closed
11/9/2012	5:30:38 PM	Main Vac valve opened
11/9/2012	5:30:38 PM	Helium MFC set to  0.000000
11/9/2012	5:30:38 PM	H2 MFC set to  0.000000
11/9/2012	5:30:38 PM	BCl3 MFC set to  0.000000
11/9/2012	5:30:38 PM	PH3 MFC set to  0.000000
11/9/2012	5:30:38 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:30:38 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:30:38 PM	Tube furnace set to 150
11/9/2012	5:31:08 PM	H2 valve closed
11/9/2012	5:31:08 PM	BCl3 valve closed
11/9/2012	5:31:08 PM	PH3 valve closed
11/9/2012	5:31:08 PM	SiCl4 pre valve closed
11/9/2012	5:31:08 PM	SiCl4 post valve closed
11/9/2012	5:31:08 PM	Bypass valve closed
11/9/2012	5:31:08 PM	Bubbler valve closed
11/9/2012	5:31:08 PM	Helium valve opened
11/9/2012	5:31:08 PM	Main Vac valve opened
11/9/2012	5:31:08 PM	Helium MFC set to  20.000000
11/9/2012	5:31:08 PM	H2 MFC set to  0.000000
11/9/2012	5:31:08 PM	BCl3 MFC set to  0.000000
11/9/2012	5:31:08 PM	PH3 MFC set to  0.000000
11/9/2012	5:31:08 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:31:08 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:31:08 PM	Tube furnace set to 150
11/9/2012	5:31:38 PM	Helium valve closed
11/9/2012	5:31:38 PM	H2 valve closed
11/9/2012	5:31:38 PM	BCl3 valve closed
11/9/2012	5:31:38 PM	PH3 valve closed
11/9/2012	5:31:38 PM	SiCl4 pre valve closed
11/9/2012	5:31:38 PM	SiCl4 post valve closed
11/9/2012	5:31:38 PM	Bypass valve closed
11/9/2012	5:31:38 PM	Bubbler valve closed
11/9/2012	5:31:38 PM	Main Vac valve opened
11/9/2012	5:31:38 PM	Helium MFC set to  0.000000
11/9/2012	5:31:38 PM	H2 MFC set to  0.000000
11/9/2012	5:31:38 PM	BCl3 MFC set to  0.000000
11/9/2012	5:31:38 PM	PH3 MFC set to  0.000000
11/9/2012	5:31:38 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:31:38 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:31:38 PM	Tube furnace set to 150
11/9/2012	5:32:08 PM	H2 valve closed
11/9/2012	5:32:08 PM	BCl3 valve closed
11/9/2012	5:32:08 PM	PH3 valve closed
11/9/2012	5:32:08 PM	SiCl4 pre valve closed
11/9/2012	5:32:08 PM	SiCl4 post valve closed
11/9/2012	5:32:08 PM	Bypass valve closed
11/9/2012	5:32:08 PM	Bubbler valve closed
11/9/2012	5:32:08 PM	Helium valve opened
11/9/2012	5:32:08 PM	Main Vac valve opened
11/9/2012	5:32:08 PM	Helium MFC set to  20.000000
11/9/2012	5:32:08 PM	H2 MFC set to  0.000000
11/9/2012	5:32:08 PM	BCl3 MFC set to  0.000000
11/9/2012	5:32:08 PM	PH3 MFC set to  0.000000
11/9/2012	5:32:08 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:32:08 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:32:08 PM	Tube furnace set to 150
11/9/2012	5:32:38 PM	Helium valve closed
11/9/2012	5:32:38 PM	H2 valve closed
11/9/2012	5:32:39 PM	BCl3 valve closed
11/9/2012	5:32:39 PM	PH3 valve closed
11/9/2012	5:32:39 PM	SiCl4 pre valve closed
11/9/2012	5:32:39 PM	SiCl4 post valve closed
11/9/2012	5:32:39 PM	Bypass valve closed
11/9/2012	5:32:39 PM	Bubbler valve closed
11/9/2012	5:32:39 PM	Main Vac valve opened
11/9/2012	5:32:39 PM	Helium MFC set to  0.000000
11/9/2012	5:32:39 PM	H2 MFC set to  0.000000
11/9/2012	5:32:39 PM	BCl3 MFC set to  0.000000
11/9/2012	5:32:39 PM	PH3 MFC set to  0.000000
11/9/2012	5:32:39 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:32:39 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:32:39 PM	Tube furnace set to 150
11/9/2012	5:33:09 PM	H2 valve closed
11/9/2012	5:33:09 PM	BCl3 valve closed
11/9/2012	5:33:09 PM	PH3 valve closed
11/9/2012	5:33:09 PM	SiCl4 pre valve closed
11/9/2012	5:33:09 PM	SiCl4 post valve closed
11/9/2012	5:33:09 PM	Bypass valve closed
11/9/2012	5:33:09 PM	Bubbler valve closed
11/9/2012	5:33:09 PM	Helium valve opened
11/9/2012	5:33:09 PM	Main Vac valve opened
11/9/2012	5:33:09 PM	Helium MFC set to  20.000000
11/9/2012	5:33:09 PM	H2 MFC set to  0.000000
11/9/2012	5:33:09 PM	BCl3 MFC set to  0.000000
11/9/2012	5:33:09 PM	PH3 MFC set to  0.000000
11/9/2012	5:33:09 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:33:09 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:33:09 PM	Tube furnace set to 150
11/9/2012	5:33:39 PM	Helium valve closed
11/9/2012	5:33:39 PM	H2 valve closed
11/9/2012	5:33:39 PM	BCl3 valve closed
11/9/2012	5:33:39 PM	PH3 valve closed
11/9/2012	5:33:39 PM	SiCl4 pre valve closed
11/9/2012	5:33:39 PM	SiCl4 post valve closed
11/9/2012	5:33:39 PM	Bypass valve closed
11/9/2012	5:33:39 PM	Bubbler valve closed
11/9/2012	5:33:39 PM	Main Vac valve opened
11/9/2012	5:33:39 PM	Helium MFC set to  0.000000
11/9/2012	5:33:39 PM	H2 MFC set to  0.000000
11/9/2012	5:33:39 PM	BCl3 MFC set to  0.000000
11/9/2012	5:33:39 PM	PH3 MFC set to  0.000000
11/9/2012	5:33:39 PM	SiCl4 MFC set to  0.000000
11/9/2012	5:33:39 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	5:33:39 PM	Tube furnace set to 150
11/9/2012	5:33:40 PM	Run finished at 5:33 PM
11/9/2012	5:57:48 PM	Main Vac valve closed
11/9/2012	5:58:00 PM	Main Vac valve opened
11/9/2012	5:59:13 PM	Helium valve opened
11/9/2012	5:59:17 PM	Helium MFC set to  20.000000
11/9/2012	6:00:08 PM	Helium valve closed
11/9/2012	6:01:56 PM	Recipe started at 6:01 PM
11/9/2012	6:01:56 PM	Helium valve closed
11/9/2012	6:01:56 PM	H2 valve closed
11/9/2012	6:01:56 PM	BCl3 valve closed
11/9/2012	6:01:56 PM	PH3 valve closed
11/9/2012	6:01:56 PM	SiCl4 pre valve closed
11/9/2012	6:01:56 PM	SiCl4 post valve closed
11/9/2012	6:01:56 PM	Main Vac valve closed
11/9/2012	6:01:56 PM	Bypass valve closed
11/9/2012	6:01:56 PM	Bubbler valve closed
11/9/2012	6:01:56 PM	Helium MFC set to  0.000000
11/9/2012	6:01:56 PM	H2 MFC set to  0.000000
11/9/2012	6:01:56 PM	BCl3 MFC set to  0.000000
11/9/2012	6:01:56 PM	PH3 MFC set to  0.000000
11/9/2012	6:01:56 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:01:56 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:01:56 PM	Tube furnace set to 0
11/9/2012	6:01:59 PM	Helium valve closed
11/9/2012	6:01:59 PM	BCl3 valve closed
11/9/2012	6:01:59 PM	PH3 valve closed
11/9/2012	6:01:59 PM	SiCl4 pre valve closed
11/9/2012	6:01:59 PM	SiCl4 post valve closed
11/9/2012	6:01:59 PM	Main Vac valve closed
11/9/2012	6:01:59 PM	Bypass valve closed
11/9/2012	6:01:59 PM	Bubbler valve closed
11/9/2012	6:01:59 PM	H2 valve opened
11/9/2012	6:01:59 PM	Helium MFC set to  0.000000
11/9/2012	6:01:59 PM	H2 MFC set to  500.000000
11/9/2012	6:01:59 PM	BCl3 MFC set to  0.000000
11/9/2012	6:01:59 PM	PH3 MFC set to  0.000000
11/9/2012	6:01:59 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:01:59 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:01:59 PM	Tube furnace set to 0
11/9/2012	6:03:12 PM	Helium valve closed
11/9/2012	6:03:12 PM	BCl3 valve closed
11/9/2012	6:03:12 PM	PH3 valve closed
11/9/2012	6:03:12 PM	SiCl4 pre valve closed
11/9/2012	6:03:12 PM	SiCl4 post valve closed
11/9/2012	6:03:12 PM	Main Vac valve closed
11/9/2012	6:03:12 PM	Bypass valve closed
11/9/2012	6:03:12 PM	H2 valve opened
11/9/2012	6:03:12 PM	Bubbler valve opened
11/9/2012	6:03:12 PM	Helium MFC set to  0.000000
11/9/2012	6:03:12 PM	H2 MFC set to  500.000000
11/9/2012	6:03:12 PM	BCl3 MFC set to  0.000000
11/9/2012	6:03:12 PM	PH3 MFC set to  0.000000
11/9/2012	6:03:12 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:03:12 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:03:12 PM	Tube furnace set to 0
11/9/2012	6:03:13 PM	Helium valve closed
11/9/2012	6:03:13 PM	BCl3 valve closed
11/9/2012	6:03:13 PM	PH3 valve closed
11/9/2012	6:03:13 PM	SiCl4 pre valve closed
11/9/2012	6:03:13 PM	SiCl4 post valve closed
11/9/2012	6:03:13 PM	Main Vac valve closed
11/9/2012	6:03:13 PM	Bypass valve closed
11/9/2012	6:03:13 PM	H2 valve opened
11/9/2012	6:03:13 PM	Bubbler valve opened
11/9/2012	6:03:13 PM	Helium MFC set to  0.000000
11/9/2012	6:03:13 PM	H2 MFC set to  500.000000
11/9/2012	6:03:13 PM	BCl3 MFC set to  0.000000
11/9/2012	6:03:13 PM	PH3 MFC set to  0.000000
11/9/2012	6:03:13 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:03:13 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:03:13 PM	Tube furnace set to 1000
11/9/2012	6:23:13 PM	Helium valve closed
11/9/2012	6:23:13 PM	PH3 valve closed
11/9/2012	6:23:13 PM	Main Vac valve closed
11/9/2012	6:23:13 PM	Bypass valve closed
11/9/2012	6:23:13 PM	H2 valve opened
11/9/2012	6:23:13 PM	BCl3 valve opened
11/9/2012	6:23:13 PM	SiCl4 pre valve opened
11/9/2012	6:23:13 PM	SiCl4 post valve opened
11/9/2012	6:23:13 PM	Bubbler valve opened
11/9/2012	6:23:13 PM	Helium MFC set to  0.000000
11/9/2012	6:23:13 PM	H2 MFC set to  450.000000
11/9/2012	6:23:13 PM	BCl3 MFC set to  1.500000
11/9/2012	6:23:13 PM	PH3 MFC set to  0.000000
11/9/2012	6:23:13 PM	SiCl4 MFC set to  50.000000
11/9/2012	6:23:13 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:23:13 PM	Tube furnace set to 1000
11/9/2012	6:38:13 PM	Helium valve closed
11/9/2012	6:38:13 PM	BCl3 valve closed
11/9/2012	6:38:13 PM	Main Vac valve closed
11/9/2012	6:38:13 PM	Bypass valve closed
11/9/2012	6:38:13 PM	H2 valve opened
11/9/2012	6:38:13 PM	PH3 valve opened
11/9/2012	6:38:13 PM	SiCl4 pre valve opened
11/9/2012	6:38:13 PM	SiCl4 post valve opened
11/9/2012	6:38:13 PM	Bubbler valve opened
11/9/2012	6:38:13 PM	Helium MFC set to  0.000000
11/9/2012	6:38:13 PM	H2 MFC set to  450.000000
11/9/2012	6:38:13 PM	BCl3 MFC set to  0.000000
11/9/2012	6:38:13 PM	PH3 MFC set to  20.000000
11/9/2012	6:38:13 PM	SiCl4 MFC set to  50.000000
11/9/2012	6:38:13 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:38:14 PM	Tube furnace set to 1000
11/9/2012	6:43:14 PM	Helium valve closed
11/9/2012	6:43:14 PM	BCl3 valve closed
11/9/2012	6:43:14 PM	PH3 valve closed
11/9/2012	6:43:14 PM	SiCl4 pre valve closed
11/9/2012	6:43:14 PM	SiCl4 post valve closed
11/9/2012	6:43:14 PM	Main Vac valve closed
11/9/2012	6:43:14 PM	Bypass valve closed
11/9/2012	6:43:14 PM	H2 valve opened
11/9/2012	6:43:14 PM	Bubbler valve opened
11/9/2012	6:43:14 PM	Helium MFC set to  0.000000
11/9/2012	6:43:14 PM	H2 MFC set to  500.000000
11/9/2012	6:43:14 PM	BCl3 MFC set to  0.000000
11/9/2012	6:43:14 PM	PH3 MFC set to  0.000000
11/9/2012	6:43:14 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:43:14 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:43:14 PM	Tube furnace set to 950
11/9/2012	6:46:14 PM	Helium valve closed
11/9/2012	6:46:14 PM	BCl3 valve closed
11/9/2012	6:46:14 PM	PH3 valve closed
11/9/2012	6:46:14 PM	SiCl4 pre valve closed
11/9/2012	6:46:14 PM	SiCl4 post valve closed
11/9/2012	6:46:14 PM	Main Vac valve closed
11/9/2012	6:46:14 PM	Bypass valve closed
11/9/2012	6:46:14 PM	H2 valve opened
11/9/2012	6:46:14 PM	Bubbler valve opened
11/9/2012	6:46:14 PM	Helium MFC set to  0.000000
11/9/2012	6:46:14 PM	H2 MFC set to  500.000000
11/9/2012	6:46:14 PM	BCl3 MFC set to  0.000000
11/9/2012	6:46:14 PM	PH3 MFC set to  0.000000
11/9/2012	6:46:14 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:46:14 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:46:14 PM	Tube furnace set to 900
11/9/2012	6:49:14 PM	Helium valve closed
11/9/2012	6:49:14 PM	BCl3 valve closed
11/9/2012	6:49:14 PM	PH3 valve closed
11/9/2012	6:49:14 PM	SiCl4 pre valve closed
11/9/2012	6:49:14 PM	SiCl4 post valve closed
11/9/2012	6:49:14 PM	Main Vac valve closed
11/9/2012	6:49:14 PM	Bypass valve closed
11/9/2012	6:49:14 PM	H2 valve opened
11/9/2012	6:49:14 PM	Bubbler valve opened
11/9/2012	6:49:14 PM	Helium MFC set to  0.000000
11/9/2012	6:49:14 PM	H2 MFC set to  500.000000
11/9/2012	6:49:14 PM	BCl3 MFC set to  0.000000
11/9/2012	6:49:14 PM	PH3 MFC set to  0.000000
11/9/2012	6:49:14 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:49:14 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:49:14 PM	Tube furnace set to 850
11/9/2012	6:52:14 PM	Helium valve closed
11/9/2012	6:52:14 PM	BCl3 valve closed
11/9/2012	6:52:14 PM	PH3 valve closed
11/9/2012	6:52:14 PM	SiCl4 pre valve closed
11/9/2012	6:52:14 PM	SiCl4 post valve closed
11/9/2012	6:52:14 PM	Main Vac valve closed
11/9/2012	6:52:14 PM	Bypass valve closed
11/9/2012	6:52:14 PM	H2 valve opened
11/9/2012	6:52:14 PM	Bubbler valve opened
11/9/2012	6:52:14 PM	Helium MFC set to  0.000000
11/9/2012	6:52:14 PM	H2 MFC set to  500.000000
11/9/2012	6:52:14 PM	BCl3 MFC set to  0.000000
11/9/2012	6:52:14 PM	PH3 MFC set to  0.000000
11/9/2012	6:52:14 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:52:14 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:52:15 PM	Tube furnace set to 800
11/9/2012	6:55:15 PM	Helium valve closed
11/9/2012	6:55:15 PM	BCl3 valve closed
11/9/2012	6:55:15 PM	PH3 valve closed
11/9/2012	6:55:15 PM	SiCl4 pre valve closed
11/9/2012	6:55:15 PM	SiCl4 post valve closed
11/9/2012	6:55:15 PM	Main Vac valve closed
11/9/2012	6:55:15 PM	Bypass valve closed
11/9/2012	6:55:15 PM	H2 valve opened
11/9/2012	6:55:15 PM	Bubbler valve opened
11/9/2012	6:55:15 PM	Helium MFC set to  0.000000
11/9/2012	6:55:15 PM	H2 MFC set to  500.000000
11/9/2012	6:55:15 PM	BCl3 MFC set to  0.000000
11/9/2012	6:55:15 PM	PH3 MFC set to  0.000000
11/9/2012	6:55:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:55:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:55:15 PM	Tube furnace set to 750
11/9/2012	6:58:15 PM	H2 valve closed
11/9/2012	6:58:15 PM	BCl3 valve closed
11/9/2012	6:58:15 PM	PH3 valve closed
11/9/2012	6:58:15 PM	SiCl4 pre valve closed
11/9/2012	6:58:15 PM	SiCl4 post valve closed
11/9/2012	6:58:15 PM	Main Vac valve closed
11/9/2012	6:58:15 PM	Bypass valve closed
11/9/2012	6:58:15 PM	Helium valve opened
11/9/2012	6:58:15 PM	Bubbler valve opened
11/9/2012	6:58:15 PM	Helium MFC set to  500.000000
11/9/2012	6:58:15 PM	H2 MFC set to  0.000000
11/9/2012	6:58:15 PM	BCl3 MFC set to  0.000000
11/9/2012	6:58:15 PM	PH3 MFC set to  0.000000
11/9/2012	6:58:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	6:58:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	6:58:15 PM	Tube furnace set to 0
11/9/2012	7:18:15 PM	Helium valve closed
11/9/2012	7:18:15 PM	H2 valve closed
11/9/2012	7:18:15 PM	BCl3 valve closed
11/9/2012	7:18:15 PM	PH3 valve closed
11/9/2012	7:18:15 PM	SiCl4 pre valve closed
11/9/2012	7:18:15 PM	SiCl4 post valve closed
11/9/2012	7:18:15 PM	Main Vac valve closed
11/9/2012	7:18:15 PM	Bypass valve closed
11/9/2012	7:18:15 PM	Bubbler valve closed
11/9/2012	7:18:15 PM	Helium MFC set to  0.000000
11/9/2012	7:18:15 PM	H2 MFC set to  0.000000
11/9/2012	7:18:15 PM	BCl3 MFC set to  0.000000
11/9/2012	7:18:15 PM	PH3 MFC set to  0.000000
11/9/2012	7:18:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	7:18:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	7:18:15 PM	Tube furnace set to 0
11/9/2012	7:48:15 PM	Helium valve closed
11/9/2012	7:48:15 PM	H2 valve closed
11/9/2012	7:48:15 PM	BCl3 valve closed
11/9/2012	7:48:15 PM	PH3 valve closed
11/9/2012	7:48:15 PM	SiCl4 pre valve closed
11/9/2012	7:48:15 PM	SiCl4 post valve closed
11/9/2012	7:48:15 PM	Main Vac valve closed
11/9/2012	7:48:15 PM	Bubbler valve closed
11/9/2012	7:48:15 PM	Bypass valve opened
11/9/2012	7:48:15 PM	Helium MFC set to  0.000000
11/9/2012	7:48:15 PM	H2 MFC set to  0.000000
11/9/2012	7:48:15 PM	BCl3 MFC set to  0.000000
11/9/2012	7:48:15 PM	PH3 MFC set to  0.000000
11/9/2012	7:48:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	7:48:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	7:48:15 PM	Tube furnace set to 0
11/9/2012	7:49:14 PM	Helium valve closed
11/9/2012	7:49:14 PM	H2 valve closed
11/9/2012	7:49:14 PM	BCl3 valve closed
11/9/2012	7:49:14 PM	PH3 valve closed
11/9/2012	7:49:14 PM	SiCl4 pre valve closed
11/9/2012	7:49:14 PM	SiCl4 post valve closed
11/9/2012	7:49:14 PM	Main Vac valve closed
11/9/2012	7:49:14 PM	Bubbler valve closed
11/9/2012	7:49:14 PM	Bypass valve opened
11/9/2012	7:49:14 PM	Helium MFC set to  0.000000
11/9/2012	7:49:14 PM	H2 MFC set to  0.000000
11/9/2012	7:49:14 PM	BCl3 MFC set to  0.000000
11/9/2012	7:49:14 PM	PH3 MFC set to  0.000000
11/9/2012	7:49:14 PM	SiCl4 MFC set to  0.000000
11/9/2012	7:49:14 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	7:49:15 PM	Tube furnace set to 0
11/9/2012	7:50:15 PM	Helium valve closed
11/9/2012	7:50:15 PM	H2 valve closed
11/9/2012	7:50:15 PM	BCl3 valve closed
11/9/2012	7:50:15 PM	PH3 valve closed
11/9/2012	7:50:15 PM	SiCl4 pre valve closed
11/9/2012	7:50:15 PM	SiCl4 post valve closed
11/9/2012	7:50:15 PM	Bypass valve closed
11/9/2012	7:50:15 PM	Bubbler valve closed
11/9/2012	7:50:15 PM	Main Vac valve opened
11/9/2012	7:50:15 PM	Helium MFC set to  0.000000
11/9/2012	7:50:15 PM	H2 MFC set to  0.000000
11/9/2012	7:50:15 PM	BCl3 MFC set to  0.000000
11/9/2012	7:50:15 PM	PH3 MFC set to  0.000000
11/9/2012	7:50:15 PM	SiCl4 MFC set to  0.000000
11/9/2012	7:50:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	7:50:15 PM	Tube furnace set to 0
11/9/2012	7:50:16 PM	Run finished at 7:50 PM
11/9/2012	8:29:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	8:29:34 PM	Recipe started at 8:29 PM
11/9/2012	8:29:34 PM	Helium valve closed
11/9/2012	8:29:34 PM	H2 valve closed
11/9/2012	8:29:34 PM	BCl3 valve closed
11/9/2012	8:29:34 PM	PH3 valve closed
11/9/2012	8:29:34 PM	SiCl4 pre valve closed
11/9/2012	8:29:34 PM	SiCl4 post valve closed
11/9/2012	8:29:34 PM	Main Vac valve closed
11/9/2012	8:29:34 PM	Bypass valve closed
11/9/2012	8:29:34 PM	Bubbler valve closed
11/9/2012	8:29:34 PM	Helium MFC set to  0.000000
11/9/2012	8:29:34 PM	H2 MFC set to  0.000000
11/9/2012	8:29:34 PM	BCl3 MFC set to  0.000000
11/9/2012	8:29:34 PM	PH3 MFC set to  0.000000
11/9/2012	8:29:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:29:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:29:34 PM	Tube furnace set to 0
11/9/2012	8:29:37 PM	H2 valve closed
11/9/2012	8:29:37 PM	BCl3 valve closed
11/9/2012	8:29:37 PM	PH3 valve closed
11/9/2012	8:29:37 PM	SiCl4 pre valve closed
11/9/2012	8:29:37 PM	SiCl4 post valve closed
11/9/2012	8:29:37 PM	Main Vac valve closed
11/9/2012	8:29:37 PM	Bypass valve closed
11/9/2012	8:29:37 PM	Bubbler valve closed
11/9/2012	8:29:37 PM	Helium valve opened
11/9/2012	8:29:37 PM	Helium MFC set to  500.000000
11/9/2012	8:29:37 PM	H2 MFC set to  0.000000
11/9/2012	8:29:37 PM	BCl3 MFC set to  0.000000
11/9/2012	8:29:37 PM	PH3 MFC set to  0.000000
11/9/2012	8:29:37 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:29:37 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:29:37 PM	Tube furnace set to 0
11/9/2012	8:30:45 PM	Helium valve closed
11/9/2012	8:30:45 PM	H2 valve closed
11/9/2012	8:30:45 PM	BCl3 valve closed
11/9/2012	8:30:45 PM	PH3 valve closed
11/9/2012	8:30:45 PM	SiCl4 pre valve closed
11/9/2012	8:30:45 PM	SiCl4 post valve closed
11/9/2012	8:30:45 PM	Main Vac valve closed
11/9/2012	8:30:45 PM	Bypass valve closed
11/9/2012	8:30:45 PM	Bubbler valve closed
11/9/2012	8:30:45 PM	Helium MFC set to  0.000000
11/9/2012	8:30:45 PM	H2 MFC set to  0.000000
11/9/2012	8:30:45 PM	BCl3 MFC set to  0.000000
11/9/2012	8:30:45 PM	PH3 MFC set to  0.000000
11/9/2012	8:30:45 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:30:45 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:30:45 PM	Tube furnace set to 0
11/9/2012	8:30:46 PM	Run finished at 8:30 PM
11/9/2012	8:30:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/9/2012	8:32:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2012	8:32:28 PM	Recipe started at 8:32 PM
11/9/2012	8:32:29 PM	Helium valve closed
11/9/2012	8:32:29 PM	H2 valve closed
11/9/2012	8:32:29 PM	BCl3 valve closed
11/9/2012	8:32:29 PM	PH3 valve closed
11/9/2012	8:32:29 PM	SiCl4 pre valve closed
11/9/2012	8:32:29 PM	SiCl4 post valve closed
11/9/2012	8:32:29 PM	Main Vac valve closed
11/9/2012	8:32:29 PM	Bubbler valve closed
11/9/2012	8:32:29 PM	Bypass valve opened
11/9/2012	8:32:29 PM	Helium MFC set to  0.000000
11/9/2012	8:32:29 PM	H2 MFC set to  0.000000
11/9/2012	8:32:29 PM	BCl3 MFC set to  0.000000
11/9/2012	8:32:29 PM	PH3 MFC set to  0.000000
11/9/2012	8:32:29 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:32:29 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:32:29 PM	Tube furnace set to 0
11/9/2012	8:33:34 PM	Helium valve closed
11/9/2012	8:33:34 PM	H2 valve closed
11/9/2012	8:33:34 PM	BCl3 valve closed
11/9/2012	8:33:34 PM	PH3 valve closed
11/9/2012	8:33:34 PM	SiCl4 pre valve closed
11/9/2012	8:33:34 PM	SiCl4 post valve closed
11/9/2012	8:33:34 PM	Main Vac valve closed
11/9/2012	8:33:34 PM	Bubbler valve closed
11/9/2012	8:33:34 PM	Bypass valve opened
11/9/2012	8:33:34 PM	Helium MFC set to  0.000000
11/9/2012	8:33:34 PM	H2 MFC set to  0.000000
11/9/2012	8:33:34 PM	BCl3 MFC set to  0.000000
11/9/2012	8:33:34 PM	PH3 MFC set to  0.000000
11/9/2012	8:33:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:33:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:33:34 PM	Tube furnace set to 0
11/9/2012	8:34:34 PM	Helium valve closed
11/9/2012	8:34:34 PM	H2 valve closed
11/9/2012	8:34:34 PM	BCl3 valve closed
11/9/2012	8:34:34 PM	PH3 valve closed
11/9/2012	8:34:34 PM	SiCl4 pre valve closed
11/9/2012	8:34:34 PM	SiCl4 post valve closed
11/9/2012	8:34:34 PM	Bypass valve closed
11/9/2012	8:34:34 PM	Bubbler valve closed
11/9/2012	8:34:34 PM	Main Vac valve opened
11/9/2012	8:34:34 PM	Helium MFC set to  0.000000
11/9/2012	8:34:34 PM	H2 MFC set to  0.000000
11/9/2012	8:34:34 PM	BCl3 MFC set to  0.000000
11/9/2012	8:34:34 PM	PH3 MFC set to  0.000000
11/9/2012	8:34:34 PM	SiCl4 MFC set to  0.000000
11/9/2012	8:34:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2012	8:34:34 PM	Tube furnace set to 0
11/9/2012	8:34:35 PM	Run finished at 8:34 PM
11/9/2012	8:34:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
